Vacuum Rotary Feedthroughs—MagiDrive Range

UHV Design’s production-proven MagiDrive series of vacuum rotary feedthroughs allow rotation to be shifted into a vacuum system with the help of a rigid high-flux magnetic coupling. The MagiDrive series does not include any dynamic seals, fluids, or bellows, thereby providing leak-tight and reliable UHV operation.

Key Features

Leak-free performance ensured by single-piece vacuum enclosure

Magnetically coupled design that is fail-safe

No sliding seals, organics, or bellows

Magnetic shielding enables use in magnetically sensitive settings

High torque-to-size ratio

Can be baked to 250 °C (even magnets)

Hollow variants enable piling up of concentric drives

Zero backlash under low acceleration and load

Solid Shaft Option

The solid-shaft array of rotary feedthroughs offers a series of normal shaft options as mentioned in the product configuration options. Users can avail of customized shafts on demand. UHV Design provides a series of extended bearing housings to support the shaft along its rotational axis.

Hollow Shaft Option

The four largest MagiDrive rotary feedthroughs are available in a hollow configuration, terminating with a non-rotating CF flange at the rear. This enables the passing of services via the drive, oralternatively for the fitting of an additional MagiDrive to the rear, thereby offering secondary axes of rotation.

Combined Compact Hollow Rotary and Linear Drive

Magnetically coupled rotation and axial motion are combined in a single device that is also compact. The rotation of a substrate cradle with the lift and using lower motion to enable sample transfer is an example application. Through the hollow drive technology, services can be passed through a substrate heating module.