Toppan Photomasks Inc.
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AutoSE: Spectroscopic Ellipsometer and Mueller Matrix Polarimeter
The AutoSE is a phase modulated Spectroscopic Ellipsometer from HORIBA Scientific. It uses Liquid Crystal Technology to modulate and analyze the polarization of the incident and reflected light beams. Ellipsometry heads are mounted on a goniometer with fixed 70° angle of incidence and a CCD camera is used for signal acquisition allowing fast measurements. The automatic stage helps to perform multiple measurements over the surface of a sample.
The AutoSE provides wavelength coverage from 450 to 1000 nm with spectral resolution of 1.5 nm. It also features 8 computer controlled microspots and the unique Vision system for improved visualization of the spot on samples, even absorbing one. The various fields of application include Semiconductors, Flat panel display, Photovoltaic devices, Functional coatings, and Biochemistry.
Specifications
Specifications of the Auto SE Simple Thin Film Measurement Spectroscopic Ellipsometer are provided in the table below:
| Wavelength Range | 450 to 1000 nm |
| Measuring Time | 1 second |
| Accuracy | NIST 100 nm d +/- 4A, n(632.8nm) +/- 0.002 |
| Angle of Incidence | Fixed at 70 Degrees (also 66 and 61.5) |
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