The Regulus8230: A Cold Field Emission Scanning Electron Microscope

The Regulus8230 from Hitachi is an ultra-high resolution cold-field emission SEM that has been improved for sensitive and nanostructure materials.

Image the Most Challenging Specimens

Sub-nanometer resolution even below 1 kV available

Latest multi-detection system such as energy filtering

High contrast imaging at ultra-low dose available with the immersion lens detection system

Comprehend internal sample data with angular adjustable HAADF, ADFand BF

Image Credit: Hitachi High-Tech Europe

Advanced Nanoanalysis

Optimized for annular or windowless EDS detectors, providing superior light element analysis

Superfast, high sensitivity EDS can be achieved with the help of annular detectors with a solid angle of greater than 1 sr

Image Credit: Hitachi High-Tech Europe

Rapid Sample Handling

Quick sample exchange provided via load lock for up to 200 mm diameter samples

Users can easily navigate on their sample or holder to determine the proper region of interest with the help of acquired SEM images or color optical image

Powerful Automation Tools

Volume microscopy with the help of automated array tomography

Automate complicated or repetitive procedures with most sophisticated scripting

Precise, calibrated dimension measurements with the help of CD-SEM algorithms

Users can automatically image huge sample areas over multiple fields of view

Future Proof

Load encapsulated oxidation sensitive specimens (such as Lithium battery components) under inert-gas or vacuum settings

Image hydrated or sensitive samples using Hitachi’s patented Ionic Liquid or a cryo stage

CL can be added for more data from pharmaceuticals, photonics, or minerals