TMC’s Quiet Island® for Enhanced Acoustic Control and Stability
Semiconductor manufacturing factories (fabs), Nanotechnology Centers, Nanofabs, and other precisi……...

This reference-class linear positioner comprises a self-clamping non-magnetic motor with sub-nanometer resolution.
High-accuracy is offered by crossed roller bearings and a direct measuring high-precision, sub-nanometer resolution linear encoder.
Salient Features
The key features of the N-664 are:
Travel range of 30 mm.
Encoder resolution of 0.5 nm.
Self locking motor.
Superior guiding accuracy.
Velocity of 10 mm/s.
Vacuum version available.
The unique PiezoWalk linear motor is non-magnetic and self clamping and provides sub-nanometer resolution. It can be integrated in actuators and linear translation stages as shown in the example above. There is a step mode and a high dynamics analog dither mode within each step.
Closed-Loop Linear Translation Stage, Nanopositioning Stage, PiezoWalk Linear Motor, Nano-Precision
Semiconductor manufacturing factories (fabs), Nanotechnology Centers, Nanofabs, and other precisi……...
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