Precision WafIR™ ATR Wafer Checker for FTIR Spectrometers

Harrick Scientific Products offers the WafIR^™, an innovative horizontal ATR accessory designed for the analysis of thin coatings on polished wafers. It utilizes a silicon crystal at a 45° incident angle to efficiently couple light into and out of the wafers.

The WafIR features a pressure applicator equipped with pressure pads, ensuring excellent contact even when the smallest contact area is beyond the region being measured. A slip clutch integrated into the pressure applicator limits the maximum force exerted on the sample. This design allows for the use of a torque wrench to achieve consistent and reproducible results.

The accessory is fully enclosed to facilitate rapid purging and is compatible with a wide range of FTIR spectrometers.

Key Features

Exclusive pressure applicator, including pads, ensures minimal contact with the sample

Fixed incident angle of 45°

Integrated slip-clutch restricts the total force exerted on the sample

Multiple reflections ensure high sensitivity

Non-contact sampling technique: contact with the coupling crystal occurs external to the measured area

It offers 33 reflections from the coated surface for a wafer with a thickness of 0.770 mm

PermaPurge^TM enables a quick exchange of samples without any interruption to the purge

Silicon coupling crystal can be replaced

The equipment can be easily aligned and used

Wafers measuring from 52 x 10 mm up to 203 mm (8″) in diameter are accommodated by the unobstructed, horizontal sampling surface

Includes

Hardware that is compatible with the given spectrometer

Silicon coupling crystal-integrated WafIR