MSA-650 IRIS Micro System Analyzer for Microscope-Based Vibrometry

The observation of dynamic response is crucial for testing and designing MEMS devices. This is essential for verifying FE calculations and establishing cross-talk effects.

The patented and novel MSA-650 IRIS Micro System Analyzer helps measure real MEMS dynamics by defining both out-of-plane and in-plane movement via silicon encapsulation without making any contact and without having to prepare or decap the device.

During fabrication processes, the MEMS capping step may lead to more stress, which may change the performance of the device. Hence, a complete characterization of the MEMS device in its encapsulated and final condition is required and crucial.

Highlights

High-resolution modal data of up to 25 MHz

Extracting live movement data even from complex-structured Si-capped MEMS

Excellent separation of distinct device layers in capped MEMS provides the real dynamical behavior of MEMS devices

Simplified FE model verification of MEMS in the final state

Video microscope measuring mode shows the in-plane movement up to 2.5 MHz

Built-in high-performance IR microscope helps measure through silicon walls

Regular data export formats for modal data, and video and graphics for direct post-processing

Modal Testing of Silicon Encapsulated MEMS

Laser-Doppler Vibrometry (LDV) is a proven method to analyze the mechanical dynamics of MEMS with excellent accuracy. But a majority of the laser vibrometers operate at visible wavelengths for which the encapsulation of silicon is opaque and prevents the inspection of MEMS devices. Hence, LDV testing of these MEMS through visible wavelengths needs either un-encapsulated MEMS or decapping the device.

MSA-650 IRIS patented infrared laser technology visualizing dynamics of capped MEMS.Image Credit: Polytec

MSA-650 IRIS Micro System Analyzer workstation measuring MEMS dynamics through Si-encapsulation. Image Credit: Polytec

Polytec MSA-650 IRIS integrated into a MPI probe station.Image Credit: Polytec

The MSA-650 IRIS, with a low-coherence SLD source and a specialized IR camera, is the world’s first measurement system equipped with this technology to quantify in-plane vibration on encapsulated silicon MEMS with as low as 30-nm resolution and live out-of-plane vibrations of up to 25 MHz with picometer resolution and below.

The latest interferometer technology from Polytec provides superior data quality, thanks to the excellent separation of individual device layers in capped MEMS devices.

Related Areas of Applications

Solar, semiconductors and electronics

Nanotechnology and microtechnology

Medicine and biology

Accessories and Components

Tripods, Test Stands, and Positioning Stages

A-STD-TST-01 Test Stand

This test stand provides sufficient workspace. With a motorized Z-axis, the travel range is 200 mm.

Image Credit: Polytec

A-STD-BAS-02 Base Stand

This stand provides rigid support for the sensor head. It includes a manual focus block with a travel range of 100 mm along with a fine and coarse drive. The stand interfaces to optical tables available in the market.

Image Credit: Polytec

A-STD-F50 Focus Block

The focus block has a travel range of 50 mm with a fine and coarse drive for manual Z-axis adjustment of the sensor head. It interfaces with wafer probe stations available in the market.

Image Credit: Polytec

Vibration Isolation, Breadboards

A-TAB-AIR-01 Active Vibration Isolation Table

This air-damped vibration isolation table comes with an active-level adjustment. It is compatible with A-STD-BAS-02 Base Stand and A-STD-TST-01 Test Stand.

Image Credit: Polytec

A-TAB-ELC-01 Active Vibration Isolation Table

This table provides an electronically regulated voice coil stabilization for maximum isolation performance. It is compatible with A-STD-BAS-02 Base Stand and A-STD-TST-01 Test Stand.

Image Credit: Polytec

A-BBO-ME02 Breadboard

This breadboard comes with a metric hole pattern. It measures 900 x 600 mm and is compatible with A-STD-BAS-02 Base Stand.

Image Credit: Polytec

A-AVI-MELA Active Vibration Isolation Breadboard

This breadboard is electronically controlled for the maximum performance of vibration isolation. Featuring a metric hole pattern, the breadboard measures 600 x 800 mm and is compatible with A-STD-BAS-02 Base Stand.

Image Credit: Polytec

Miscellaneous

MSA-A-WPM Wafer Prober Module

The wafer prober module, along with the A-PST-200P XY positioning stage, creates a motorized platform for electrical contacting and highly accurate measurement of substrates and wafers up to 200 mm in diameter.

Image Credit: Polytec