The Filmetrics® F54-XY for Thickness Measurement

The Filmetrics^®F54-XY film thickness measurement equipment is intended to measure samples up to 200mm round for the F54-XY-200 (or 300mm round for the F54-XYT-300) in an automated process.

The F54-XY comes in a variety of wavelength configurations, allowing it to work with a diverse range of film thickness measurement applications. Usually, thinner films need shorter wavelengths for measurement, while thicker, rougherand more opaque films necessitate longer wavelengths.

The F54-XY can map a variety of samples that include:

Photoresist, oxides, nitrides, SOIand wafer backgrinding for semiconductor production

LCD with cell gaps, polyimideand ITO

Photoresist, silicon membranesand dielectric stacks are examples of MEMS

Hardness coatings, anti-reflection coatingsand filters are examples of optical coatings

Pattern recognition with auto deskew and a 3-position automatic turret are available for the F54-XY.

Key Features

Motorized X-Y stage for accurate, pre-determined readings

Simple and easy to save, replicateand visualize results

Incorporated microscope and live video

Polar, rectangular, linearand custom mapping layouts

Tiny spot size and autofocus for optimal accuracy

Clear analytical software

Extensive mechanical characteristics library

Embedded online diagnostics

24-hour email, phoneand online service

Filmetrics F54-XYT-300 film thickness measurement tool. Image Credit: KLA Instruments™

F54-XY wavelength configurations.Image Credit: KLA Instruments™