M-110: Ultra Compact Micro-Translation Stage

上海仪舶实验室自动化 25-01-23 12:51:48

The M-110 ultra-compact micro-translation stage from PI has a resolution of 50 nm.

Highly compact as a result of folded drive

XY setups could be mounted directly

Huge quantities available rapidly

Variants ideal for vacuum available

Noncontact reference and limit switches

Comes with stepper motors and closed-loop DC motors

M-11x.xxx1, dimensions in mm.

M-11x.xxx1, dimensions in mm. Image Credit: PI (Physik Instrumente) LP

XY setups possible without adapter plate.

XY setups possible without adapter plate. Image Credit: PI (Physik Instrumente) LP

Product Description

Compact Linear Stage, Versatile in use

Linear stage is available with small size due to the folded drive with belt drive. A clear aperture comes with 10 mm Ø. XY setups canbe mounted instantly without an adapter plate.

Drive

Comes with a 2-phase stepper motor or closed-loop DC gear motor

Backlash-compensated threaded spindle or ball screw is provided

Position Measuring

Noncontact Hall effect reference and limit switches

Variants with DC gear motor: Rotary encoder available on the motor shaft

Application Fields

Precision micro-assembly

Laser inscription

Research

Automation

Optical alignment

Specifications

5 mm

Table 1. Source: PI (Physik Instrumente) LP

Motion	M-110.1DG1	M-110.2DG1	M-110.12S1	M-110.22S1	Tolerance
Active axes	X	X	X	X
Travel range in X	5 mm	5 mm	5 mm	5 mm
Maximum velocity in X, unloaded	1 mm/s	1.5 mm/s	1 mm/s	1 mm/s
Positioning	M-110.1DG1	M-110.2DG1	M-110.12S1	M-110.22S1	Tolerance
Unidirectional repeatability in X	0.25 µm	0.15 µm	0.25 µm	0.15 µm	typ.
Bidirectional repeatability in X	± 2 µm	± 2 µm	± 2 µm	± 2 µm	typ.
Minimum incremental motion in X	0.05 µm	0.2 µm	0.02 µm	0.2 µm	typ.
Backlash in X	3 µm	3 µm	3 µm	3 µm	typ.
Reference switch	Hall effect	Hall effect	Hall effect	Hall effect
Limit switches	Hall effect	Hall effect	Hall effect	Hall effect
Motor encoder	Incremental rotary encoder	Incremental rotary encoder
Resolution, motor encoder	2048 Cts./rev.	2048 Cts./rev.
Motor encoder: Sensor signal	A/B quadrature, RS-422	A/B quadrature, RS-422
Drive Properties	M-110.1DG1	M-110.2DG1	M-110.12S1	M-110.22S1	Tolerance
Drive type	DC gear motor	DC gear motor	2-phase stepper motor	2-phase stepper motor
Nominal voltage	12 V	12 V
Nominal current, RMS	0.16 A	0.16 A	0.25 A	0.25 A	typ.
Drive force in negative direction of motion in X	10 N	10 N	10 N	10 N	typ.
Drive force in positive direction of motion in X	10 N	10 N	10 N	10 N	typ.
Motor resolution			24 Full steps/rev.	24 Full steps/rev.
Mechanical Properties	M-110.1DG1	M-110.2DG1	M-110.12S1	M-110.22S1	Tolerance
Guide	Ball guide	Ball guide	Ball guide	Ball guide
Drive screw type	Fine-threaded spindle	Ball screw	Fine-threaded spindle	Ball screw
Drive screw pitch	0.4 mm	0.5 mm	0.4 mm	0.5 mm
Gear ratio i	256 : 9	256 : 9	256 : 9	256 : 9
Moved mass in X, unloaded	11 g	12 g	11 g	12 g
Permissible push force in Y	15 N	15 N	15 N	15 N	max.
Permissible push force in Z	30 N	30 N	30 N	30 N	max.
Permissible torque in θx	0.15 N·m	0.15 N·m	0.15 N·m	0.15 N·m	max.
Permissible torque in θY	0.15 N·m	0.15 N·m	0.15 N·m	0.15 N·m	max.
Permissible torque in θZ	0.15 N·m	0.15 N·m	0.15 N·m	0.15 N·m	max.
Overall mass	250 g	250 g	250 g	250 g
Material	Anodized aluminum	Anodized aluminum	Anodized aluminum	Anodized aluminum
Holding force in X, passive			10 N	10 N
Miscellaneous	M-110.1DG1	M-110.2DG1	M-110.12S1	M-110.22S1	Tolerance
Connector	HD D-sub 26-pin (m)	HD D-sub 26-pin (m)	HD D-sub 26-pin (m)	HD D-sub 26-pin (m)
Recommended controllers / drivers	C-863 C-884 G-901 G-910 ACS modular controller	C-863 C-884 G-901 G-910 ACS modular controller	C-663 G-901 G-910 ACS modular controller	C-663 G-901 G-910 ACS modular controller
Cable length	0.5 m	0.5 m	0.5 m	0.5 m
Operating temperature range	-20 to 65 °C	-20 to 65 °C	-20 to 65 °C	-20 to 65 °C

Note on minimum incremental motion: Values are achieved with the recommended controller

Note on nominal current: Values apply per phase

15 mm

Table 2. Source: PI (Physik Instrumente) LP

Motion	M-111.1DG1	M-111.2DG1	M-111.12S1	M-111.22S1	Tolerance
Active axes	X	X	X	X
Travel range in X	15 mm	15 mm	15 mm	15 mm
Maximum velocity in X, unloaded	1.5 mm/s	2 mm/s	1 mm/s	1 mm/s
Positioning	M-111.1DG1	M-111.2DG1	M-111.12S1	M-111.22S1	Tolerance
Unidirectional repeatability in X	0.25 µm	0.15 µm	0.25 µm	0.15 µm	typ.
Bidirectional repeatability in X	± 2 µm	± 2 µm	± 2 µm	± 2 µm	typ.
Minimum incremental motion in X	0.05 µm	0.2 µm	0.02 µm	0.2 µm	typ.
Backlash in X	3 µm	3 µm	3 µm	3 µm	typ.
Reference switch	Hall effect	Hall effect	Hall effect	Hall effect
Limit switches	Hall effect	Hall effect	Hall effect	Hall effect
Motor encoder	Incremental rotary encoder	Incremental rotary encoder
Resolution, motor encoder	2048 Cts./rev.	2048 Cts./rev.
Motor encoder: Sensor signal	A/B quadrature, RS-422	A/B quadrature, RS-422
Drive Properties	M-111.1DG1	M-111.2DG1	M-111.12S1	M-111.22S1	Tolerance
Drive type	DC gear motor	DC gear motor	2-phase stepper motor	2-phase stepper motor
Nominal voltage	12 V	12 V
Nominal current, RMS	0.32 A	0.32 A	0.25 A	0.25 A	typ.
Drive force in negative direction of motion in X	10 N	10 N	10 N	10 N	typ.
Drive force in positive direction of motion in X	10 N	10 N	10 N	10 N	typ.
Motor resolution			24 Full steps/rev.	24 Full steps/rev.
Mechanical Properties	M-111.1DG1	M-111.2DG1	M-111.12S1	M-111.22S1	Tolerance
Guide	Ball guide	Ball guide	Ball guide	Ball guide
Drive screw type	Fine-threaded spindle	Ball screw	Fine-threaded spindle	Ball screw
Drive screw pitch	0.4 mm	0.5 mm	0.4 mm	0.5 mm
Gear ratio i	256 : 9	256 : 9	256 : 9	256 : 9
Moved mass in X, unloaded	11 g	12 g	11 g	12 g
Permissible push force in Y	10 N	10 N	10 N	10 N	max.
Permissible push force in Z	30 N	30 N	30 N	30 N	max.
Permissible torque in θx	0.15 N·m	0.15 N·m	0.15 N·m	0.15 N·m	max.
Permissible torque in θY	0.15 N·m	0.15 N·m	0.15 N·m	0.15 N·m	max.
Permissible torque in θZ	0.15 N·m	0.15 N·m	0.15 N·m	0.15 N·m	max.
Overall mass	270 g	270 g	270 g	270 g
Material	Anodized aluminum	Anodized aluminum	Anodized aluminum	Anodized aluminum
Holding force in X, passive			10 N	10 N
Miscellaneous	M-111.1DG1	M-111.2DG1	M-111.12S1	M-111.22S1	Tolerance
Connector	HD D-sub 26-pin (m)	HD D-sub 26-pin (m)	HD D-sub 26-pin (m)	HD D-sub 26-pin (m)
Recommended controllers / drivers	C-863 C-884 G-901 G-910 ACS modular controller	C-863 C-884 G-901 G-910 ACS modular controller	C-663 G-901 G-910 ACS modular controller	C-663 G-901 G-910 ACS modular controller
Cable length	0.5 m	0.5 m	0.5 m	0.5 m
Operating temperature range	-20 to 65 °C	-20 to 65 °C	-20 to 65 °C	-20 to 65 °C

Note on minimum incremental motion: Values are achieved with the recommended controller

Note on nominal current: Values apply per phase

25 mm

Table 3. Source: PI (Physik Instrumente) LP

Motion	M-112.1DG1	M-112.2DG1	M-112.12S1	M-112.22S1	Tolerance
Active axes	X	X	X	X
Travel range in X	25 mm	25 mm	25 mm	25 mm
Maximum velocity in X, unloaded	1.5 mm/s	2 mm/s	1 mm/s	1 mm/s
Positioning	M-112.1DG1	M-112.2DG1	M-112.12S1	M-112.22S1	Tolerance
Unidirectional repeatability in X	0.25 µm	0.15 µm	0.25 µm	0.15 µm	typ.
Bidirectional repeatability in X	± 2 µm	± 2 µm	± 2 µm	± 2 µm	typ.
Minimum incremental motion in X	0.05 µm	0.2 µm	0.02 µm	0.2 µm	typ.
Backlash in X	3 µm	3 µm	3 µm	3 µm	typ.
Reference switch	Hall effect	Hall effect	Hall effect	Hall effect
Limit switches	Hall effect	Hall effect	Hall effect	Hall effect
Motor encoder	Incremental rotary encoder	Incremental rotary encoder
Resolution, motor encoder	2048 Cts./rev.	2048 Cts./rev.
Motor encoder: Sensor signal	A/B quadrature, RS-422	A/B quadrature, RS-422
Drive Properties	M-112.1DG1	M-112.2DG1	M-112.12S1	M-112.22S1	Tolerance
Drive type	DC gear motor	DC gear motor	2-phase stepper motor	2-phase stepper motor
Nominal voltage	12 V	12 V
Nominal current, RMS	0.32 A	0.32 A	0.25 A	0.25 A	typ.
Drive force in negative direction of motion in X	10 N	10 N	10 N	10 N	typ.
Drive force in positive direction of motion in X	10 N	10 N	10 N	10 N	typ.
Motor resolution			24 Full steps/rev.	24 Full steps/rev.
Mechanical Properties	M-112.1DG1	M-112.2DG1	M-112.12S1	M-112.22S1	Tolerance
Guide	Ball guide	Ball guide	Ball guide	Ball guide
Drive screw type	Fine-threaded spindle	Ball screw	Fine-threaded spindle	Ball screw
Drive screw pitch	0.4 mm	0.5 mm	0.4 mm	0.5 mm
Gear ratio i	256 : 9	256 : 9	256 : 9	256 : 9
Moved mass in X, unloaded	11 g	12 g	11 g	12 g
Permissible push force in Y	10 N	10 N	10 N	10 N	max.
Permissible push force in Z	20 N	20 N	20 N	20 N	max.
Permissible torque in θx	0.15 N·m	0.15 N·m	0.15 N·m	0.15 N·m	max.
Permissible torque in θY	0.15 N·m	0.15 N·m	0.15 N·m	0.15 N·m	max.
Permissible torque in θZ	0.15 N·m	0.15 N·m	0.15 N·m	0.15 N·m	max.
Overall mass	300 g	300 g	300 g	300 g
Material	Anodized aluminum	Anodized aluminum	Anodized aluminum	Anodized aluminum
Holding force in X, passive			10 N	10 N
Miscellaneous	M-112.1DG1	M-112.2DG1	M-112.12S1	M-112.22S1	Tolerance
Connector	HD D-sub 26-pin (m)	HD D-sub 26-pin (m)	HD D-sub 26-pin (m)	HD D-sub 26-pin (m)
Recommended controllers / drivers	C-863 C-884 G-901 G-910 ACS modular controller	C-863 C-884 G-901 G-910 ACS modular controller	C-663 G-901 G-910 ACS modular controller	C-663 G-901 G-910 ACS modular controller
Cable length	0.5 m	0.5 m	0.5 m	0.5 m
Operating temperature range	-20 to 65 °C	-20 to 65 °C	-20 to 65 °C	-20 to 65 °C

Note on minimum incremental motion: Values are achieved with the recommended controller

Note on nominal current: Values apply per phase

标签：Nanopositioning Systems

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