M-110: Ultra Compact Micro-Translation Stage

上海仪舶实验室自动化 25-01-23 12:51:48

M-110: Ultra Compact Micro-Translation Stage

The M-110 ultra-compact micro-translation stage from PI has a resolution of 50 nm.

Highly compact as a result of folded drive

XY setups could be mounted directly

Huge quantities available rapidly

Variants ideal for vacuum available

Noncontact reference and limit switches

Comes with stepper motors and closed-loop DC motors

M-11x.xxx1, dimensions in mm.

M-11x.xxx1, dimensions in mm. Image Credit: PI (Physik Instrumente) LP

XY setups possible without adapter plate.

XY setups possible without adapter plate. Image Credit: PI (Physik Instrumente) LP

Product Description

Compact Linear Stage, Versatile in use

Linear stage is available with small size due to the folded drive with belt drive. A clear aperture comes with 10 mm Ø. XY setups canbe mounted instantly without an adapter plate.

Drive

Comes with a 2-phase stepper motor or closed-loop DC gear motor

Backlash-compensated threaded spindle or ball screw is provided

Position Measuring

Noncontact Hall effect reference and limit switches

Variants with DC gear motor: Rotary encoder available on the motor shaft

Application Fields

Precision micro-assembly

Laser inscription

Research

Automation

Optical alignment

Specifications

5 mm

Table 1. Source: PI (Physik Instrumente) LP

Motion M-110.1DG1 M-110.2DG1 M-110.12S1 M-110.22S1 Tolerance
Active axes X X X X
Travel range in X 5 mm 5 mm 5 mm 5 mm
Maximum velocity in X, unloaded 1 mm/s 1.5 mm/s 1 mm/s 1 mm/s
Positioning M-110.1DG1 M-110.2DG1 M-110.12S1 M-110.22S1 Tolerance
Unidirectional repeatability in X 0.25 µm 0.15 µm 0.25 µm 0.15 µm typ.
Bidirectional repeatability in X ± 2 µm ± 2 µm ± 2 µm ± 2 µm typ.
Minimum incremental motion in X 0.05 µm 0.2 µm 0.02 µm 0.2 µm typ.
Backlash in X 3 µm 3 µm 3 µm 3 µm typ.
Reference switch Hall effect Hall effect Hall effect Hall effect
Limit switches Hall effect Hall effect Hall effect Hall effect
Motor encoder Incremental rotary encoder Incremental rotary encoder
Resolution, motor encoder 2048 Cts./rev. 2048 Cts./rev.
Motor encoder: Sensor signal A/B quadrature, RS-422 A/B quadrature, RS-422
Drive Properties M-110.1DG1 M-110.2DG1 M-110.12S1 M-110.22S1 Tolerance
Drive type DC gear motor DC gear motor 2-phase stepper motor 2-phase stepper motor
Nominal voltage 12 V 12 V
Nominal current, RMS 0.16 A 0.16 A 0.25 A 0.25 A typ.
Drive force in negative direction of motion in X 10 N 10 N 10 N 10 N typ.
Drive force in positive direction of motion in X 10 N 10 N 10 N 10 N typ.
Motor resolution 24 Full steps/rev. 24 Full steps/rev.
Mechanical Properties M-110.1DG1 M-110.2DG1 M-110.12S1 M-110.22S1 Tolerance
Guide Ball guide Ball guide Ball guide Ball guide
Drive screw type Fine-threaded spindle Ball screw Fine-threaded spindle Ball screw
Drive screw pitch 0.4 mm 0.5 mm 0.4 mm 0.5 mm
Gear ratio i 256 : 9 256 : 9 256 : 9 256 : 9
Moved mass in X, unloaded 11 g 12 g 11 g 12 g
Permissible push force in Y 15 N 15 N 15 N 15 N max.
Permissible push force in Z 30 N 30 N 30 N 30 N max.
Permissible torque in θx 0.15 N·m 0.15 N·m 0.15 N·m 0.15 N·m max.
Permissible torque in θY 0.15 N·m 0.15 N·m 0.15 N·m 0.15 N·m max.
Permissible torque in θZ 0.15 N·m 0.15 N·m 0.15 N·m 0.15 N·m max.
Overall mass 250 g 250 g 250 g 250 g
Material Anodized aluminum Anodized aluminum Anodized aluminum Anodized aluminum
Holding force in X, passive 10 N 10 N
Miscellaneous M-110.1DG1 M-110.2DG1 M-110.12S1 M-110.22S1 Tolerance
Connector HD D-sub 26-pin (m) HD D-sub 26-pin (m) HD D-sub 26-pin (m) HD D-sub 26-pin (m)
Recommended controllers / drivers

C-863

C-884

G-901

G-910

ACS modular controller

C-863

C-884

G-901

G-910

ACS modular controller

C-663

G-901

G-910

ACS modular controller

C-663

G-901

G-910

ACS modular controller
Cable length 0.5 m 0.5 m 0.5 m 0.5 m
Operating temperature range -20 to 65 °C -20 to 65 °C -20 to 65 °C -20 to 65 °C

Note on minimum incremental motion: Values are achieved with the recommended controller

Note on nominal current: Values apply per phase

15 mm

Table 2. Source: PI (Physik Instrumente) LP

Motion M-111.1DG1 M-111.2DG1 M-111.12S1 M-111.22S1 Tolerance
Active axes X X X X
Travel range in X 15 mm 15 mm 15 mm 15 mm
Maximum velocity in X, unloaded 1.5 mm/s 2 mm/s 1 mm/s 1 mm/s
Positioning M-111.1DG1 M-111.2DG1 M-111.12S1 M-111.22S1 Tolerance
Unidirectional repeatability in X 0.25 µm 0.15 µm 0.25 µm 0.15 µm typ.
Bidirectional repeatability in X ± 2 µm ± 2 µm ± 2 µm ± 2 µm typ.
Minimum incremental motion in X 0.05 µm 0.2 µm 0.02 µm 0.2 µm typ.
Backlash in X 3 µm 3 µm 3 µm 3 µm typ.
Reference switch Hall effect Hall effect Hall effect Hall effect
Limit switches Hall effect Hall effect Hall effect Hall effect
Motor encoder Incremental rotary encoder Incremental rotary encoder
Resolution, motor encoder 2048 Cts./rev. 2048 Cts./rev.
Motor encoder: Sensor signal A/B quadrature, RS-422 A/B quadrature, RS-422
Drive Properties M-111.1DG1 M-111.2DG1 M-111.12S1 M-111.22S1 Tolerance
Drive type DC gear motor DC gear motor 2-phase stepper motor 2-phase stepper motor
Nominal voltage 12 V 12 V
Nominal current, RMS 0.32 A 0.32 A 0.25 A 0.25 A typ.
Drive force in negative direction of motion in X 10 N 10 N 10 N 10 N typ.
Drive force in positive direction of motion in X 10 N 10 N 10 N 10 N typ.
Motor resolution 24 Full steps/rev. 24 Full steps/rev.
Mechanical Properties M-111.1DG1 M-111.2DG1 M-111.12S1 M-111.22S1 Tolerance
Guide Ball guide Ball guide Ball guide Ball guide
Drive screw type Fine-threaded spindle Ball screw Fine-threaded spindle Ball screw
Drive screw pitch 0.4 mm 0.5 mm 0.4 mm 0.5 mm
Gear ratio i 256 : 9 256 : 9 256 : 9 256 : 9
Moved mass in X, unloaded 11 g 12 g 11 g 12 g
Permissible push force in Y 10 N 10 N 10 N 10 N max.
Permissible push force in Z 30 N 30 N 30 N 30 N max.
Permissible torque in θx 0.15 N·m 0.15 N·m 0.15 N·m 0.15 N·m max.
Permissible torque in θY 0.15 N·m 0.15 N·m 0.15 N·m 0.15 N·m max.
Permissible torque in θZ 0.15 N·m 0.15 N·m 0.15 N·m 0.15 N·m max.
Overall mass 270 g 270 g 270 g 270 g
Material Anodized aluminum Anodized aluminum Anodized aluminum Anodized aluminum
Holding force in X, passive 10 N 10 N
Miscellaneous M-111.1DG1 M-111.2DG1 M-111.12S1 M-111.22S1 Tolerance
Connector HD D-sub 26-pin (m) HD D-sub 26-pin (m) HD D-sub 26-pin (m) HD D-sub 26-pin (m)
Recommended controllers / drivers

C-863

C-884

G-901

G-910

ACS modular controller

C-863

C-884

G-901

G-910

ACS modular controller

C-663

G-901

G-910

ACS modular controller

C-663

G-901

G-910

ACS modular controller
Cable length 0.5 m 0.5 m 0.5 m 0.5 m
Operating temperature range -20 to 65 °C -20 to 65 °C -20 to 65 °C -20 to 65 °C

Note on minimum incremental motion: Values are achieved with the recommended controller

Note on nominal current: Values apply per phase

25 mm

Table 3. Source: PI (Physik Instrumente) LP

Motion M-112.1DG1 M-112.2DG1 M-112.12S1 M-112.22S1 Tolerance
Active axes X X X X
Travel range in X 25 mm 25 mm 25 mm 25 mm
Maximum velocity in X, unloaded 1.5 mm/s 2 mm/s 1 mm/s 1 mm/s
Positioning M-112.1DG1 M-112.2DG1 M-112.12S1 M-112.22S1 Tolerance
Unidirectional repeatability in X 0.25 µm 0.15 µm 0.25 µm 0.15 µm typ.
Bidirectional repeatability in X ± 2 µm ± 2 µm ± 2 µm ± 2 µm typ.
Minimum incremental motion in X 0.05 µm 0.2 µm 0.02 µm 0.2 µm typ.
Backlash in X 3 µm 3 µm 3 µm 3 µm typ.
Reference switch Hall effect Hall effect Hall effect Hall effect
Limit switches Hall effect Hall effect Hall effect Hall effect
Motor encoder Incremental rotary encoder Incremental rotary encoder
Resolution, motor encoder 2048 Cts./rev. 2048 Cts./rev.
Motor encoder: Sensor signal A/B quadrature, RS-422 A/B quadrature, RS-422
Drive Properties M-112.1DG1 M-112.2DG1 M-112.12S1 M-112.22S1 Tolerance
Drive type DC gear motor DC gear motor 2-phase stepper motor 2-phase stepper motor
Nominal voltage 12 V 12 V
Nominal current, RMS 0.32 A 0.32 A 0.25 A 0.25 A typ.
Drive force in negative direction of motion in X 10 N 10 N 10 N 10 N typ.
Drive force in positive direction of motion in X 10 N 10 N 10 N 10 N typ.
Motor resolution 24 Full steps/rev. 24 Full steps/rev.
Mechanical Properties M-112.1DG1 M-112.2DG1 M-112.12S1 M-112.22S1 Tolerance
Guide Ball guide Ball guide Ball guide Ball guide
Drive screw type Fine-threaded spindle Ball screw Fine-threaded spindle Ball screw
Drive screw pitch 0.4 mm 0.5 mm 0.4 mm 0.5 mm
Gear ratio i 256 : 9 256 : 9 256 : 9 256 : 9
Moved mass in X, unloaded 11 g 12 g 11 g 12 g
Permissible push force in Y 10 N 10 N 10 N 10 N max.
Permissible push force in Z 20 N 20 N 20 N 20 N max.
Permissible torque in θx 0.15 N·m 0.15 N·m 0.15 N·m 0.15 N·m max.
Permissible torque in θY 0.15 N·m 0.15 N·m 0.15 N·m 0.15 N·m max.
Permissible torque in θZ 0.15 N·m 0.15 N·m 0.15 N·m 0.15 N·m max.
Overall mass 300 g 300 g 300 g 300 g
Material Anodized aluminum Anodized aluminum Anodized aluminum Anodized aluminum
Holding force in X, passive 10 N 10 N
Miscellaneous M-112.1DG1 M-112.2DG1 M-112.12S1 M-112.22S1 Tolerance
Connector HD D-sub 26-pin (m) HD D-sub 26-pin (m) HD D-sub 26-pin (m) HD D-sub 26-pin (m)
Recommended controllers / drivers

C-863

C-884

G-901

G-910

ACS modular controller

C-863

C-884

G-901

G-910

ACS modular controller

C-663

G-901

G-910

ACS modular controller

C-663

G-901

G-910

ACS modular controller
Cable length 0.5 m 0.5 m 0.5 m 0.5 m
Operating temperature range -20 to 65 °C -20 to 65 °C -20 to 65 °C -20 to 65 °C

Note on minimum incremental motion: Values are achieved with the recommended controller

Note on nominal current: Values apply per phase

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