Low-Profile High-Speed Stage with Ultrasonic Piezo Linear Drives & Direct Position Measurement

The U-523 micropositioning systems from Physik-Instrumente are low-profile, high-accuracy translation stages with linear encoders. The U-523 stage is next-larger in the series of ultrasonic piezomotor-driven stages of which the U-521 is the smallest. For improved guiding accuracy, the U-523 uses two crossed roller bearings mounted on ground aluminum profiles. The integrated PILine^® linear motor can generate closed-loop velocities to 200 mm/s over a 22 mm travel range. An integrated XY stage based on the U-523 is available as the U-723.

Features

Features of the U-523 micropositioning systems include:

Travel Range 22 mm

Max. Velocity 200 mm/s

Ultra-Low Profile

Direct Metrology Linear Encoder with 0.01 µm Resolution

High Guiding Accuracy with Crossed Roller Bearings

Piezo Linear Motor

Self Locking at Rest

Advantages of PILine^® Micropositioning Systems

The ultrasonic piezoceramic drives used in PILine^® micropositioners have a number of advantages over classical drives:

Higher Accelerations, up to 5 g

Speeds up to 500 mm/s

Small Form Factor

Self-Locking When Powered Down

No Shafts, Gears or Other Rotating Parts

Non-Magnetic and Vacuum-Compatible Drive Principle

Application Examples

U-523 micropositioning systems are suitable for use is:

Biotechnology

Micromanipulation

Microscopy

Quality assurance testing

Metrology

Mass storage device testing

R&D

Photonics packaging