Verifire™ MST: Commercial Interferometer System

Optimize the complex—multiple surfaces produce complex fringe patterns; the Verifire^TM MST acquires phase data from multiple surfaces at the same time using patented wavelength-shifting technology.

Report critical metrics from individual parallel window surfaces, transmitted wavefront, and accurate surface-to-surface data, such as total thickness variation (TTV), wedge, and material inhomogeneity.

With accurate surface and thickness variation metrology for test parts as thin as 0.5 mm, the Verifire^TM MST addresses demanding applications such as data storage discs, mobile device display glass, and semiconductor wafers.

Meet Zygo's Verifire™ MSTPlay

Video Credit: Zygo Corporation

More Info

The Verifire^TM MST measures the surface form and transmitted wavefront of optical components and lens systems with high precision. It is the only commercial interferometer system capable of measuring multiple surfaces at the same time while maintaining relative surface information and offering fast and simple results from multiple surfaces.

Key Features

Surface and wavefront characterization in real-time, as well as precise surface-to-surface metrology such as TTV and wedge

Surface and thickness qualification of test parts with thicknesses as thin as 0.5 mm

A wide range of lateral resolutions, including pixel-limited optical designs, are available to provide optimal ITF.

1.2 k × 1.2 k (includes discrete zoom turret for optical zoom up to 3×)

2.3 k × 2.3 k

3.4 k × 3.4 k

Operating wavelengths from 633 nm to 1.053 µm, 1.064 µm, and 1.55 µm available.

QPSI^TM acquisition technology, available only from ZYGO, facilitates accurate measurements in vibration-prone environments—now available in wavelength shifting and multi-surface FTPSI acquisition.

Ring of Fire artifact reduction source included standard—nullifies bullseyes and decreases coherent noise.