The Regulus8230: A Cold Field Emission Scanning Electron Microscope
The Regulus8230 from Hitachi is an ultra-high resolution cold-field emission SEM that has been im……...

The Lasair® III 110, employing a laser diode, is an authentic 0.1 µm particle counter with a flow rate of 1.0 CFM. It provides a broad range of features along with unparalleled precision. This model ensures lower operational costs and is designed for reliability and durability, backed by a three-year warranty on its laser.
Benefits
Reduce Defects
Actual detection of 0.1 µm particles
Full range of accessories for monitoring in different applications
Real-time measurement of yield-impacting particles
Increase Productivity
Quiet operation enhances the working environment
Interfaces with Facility Net software for comprehensive data management
Cost-Effective
Critical orifice configuration can use house vacuum for aerosol manifold applications
Easy to clean/wipe down; designed to minimize particle traps
Eliminates the need for frequent, costly laser cleaning
Long-lasting cooled diode with a 3-year laser warranty
Rugged, chemical-resistant, stainless steel casing
Users can use the same particle counter for ISO Class 1 – 9 applications
Features
Diode laser
Eight user-adjustable size channels ranging from 0.1 to 5.0 µm
It incorporates up to four environmental sensors
Applications
Monitoring of cleanrooms and mini environments
High-sensitivity applications
Filter testing
Manifold sampling (as performed with the Aerosol Manifold II)
Monitoring process gas (using a High-Pressure Diffuser)
Ultraclean zones (ISO 1–2)
Specifications
Source: Particle Measuring Systems
| . | . |
|---|---|
| Channel thresholds | 0.1, 0.15, 0.2, 0.25, 0.3, 0.5, 1.0, and 5.0 μm by default – All 8 channels are user-adjustable |
| Counting efficiency | 50% @ 0.1 μm |
| Flow rate | 1 CFM (28.3 LPM) |
| Calibration | Materials traceable to US National Institute of Standards and Technology (NIST); ISO 21501-4 Compliant |
| Test methodology | 0.1 μm particles verified by Differential Mobility Analysis; larger sizes verified by transmission electron microscopy |
| Maximum concentration | @ 10% coincidence loss: > 950,000/ft3 (optional diluter required for ISO Class 8+); automatic coincidence alarm |
| Zero count level | Exceeds JIS (Japanese Industrial Standards), allowing use in ISO Class 1 and ISO Class 2 rooms |
| Laser source | Laser diode, 6 W (de-rated to 2.5 W), 810 nm, infrared |
| Laser cooling | Thermoelectric chilling (Peltier cooler), heat sink, dedicated cooling fan |
| Vacuum | 1/4” barbed fitting. Requires > 15 in Hg |
| Warranty | 3-year warranty on laser module, 2-year warranty on other components |
| Communication modes | Ethernet (PMS Protocol, Modbus TCP) or RS-232; four 4-20 mA outputs (3 particle, 1 status)Pulse/TTL Output |
| Environmental sensors | Optional Temp/RH probe; integrates up to 4 external sensors via 4-20 mA input |
| Remote operation | Use Facility Net software to control remotely |
| Data and sampling security | Stored data records cannot be altered; sampling recipes can be password-protected |
| External surface | Stainless steel chassis and anodized aluminum chassis, all ESA/ESD compliant |
| Cleaning materials | Bleach, ethyl/isopropyl alcohol, peroxide/quaternary ammonium solutions |
| Dimensions (l, w, h) | 11.0 x 12.5 x 18.5 in (28.0 x 31.8 x 47.0 cm) |
| Weight | 29.6 lb (13.4 kg) |
| Power | 100 – 240 V, 3 A, 50 – 60 Hz |
| Operating environment and sample conditions | Temperature: 15 – 30 °C (59 - 86 °F); Humidity: 1 – 95% non-condensing; Ambient pressure @ altitudes from 0 – 7,000 ft (0 – 2,134 m) |
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