HPGP™ 101-C Reliable In-Line Gas Particle Counter

上海仪舶实验室自动化 25-01-23 13:42:37

HPGP™ 101-C Reliable In-Line Gas Particle Counter

High-purity gases are frequently needed in high-tech production operations. The HPGP 101-C offers reliablein-line contamination monitoring for process gasses at line pressure.

Control Box.

Control Box. Image Credit: Particle Measuring Systems

The HPGP is compatible with the majority of non-toxic gases and canbe utilized in various reactive gas monitoring applications.

The PDS-E (Particle Data System - Ethernet) instrument collectsand reports data that has been captured by the HPGP 101-C probe.

Source: Particle Measuring Systems

Particle Counter CDA N2 Ar CO2 O2/He/Ne/H2
Airnet Y Y N N N
Lasair III 110 Y Y N N N
Lasair III 310 Y Y Y N N
IsoAir 310P Y Y Y N N
IsoAir Pro-E/Plus Y Y Y Y N
Lasair Pro Y Y Y Y N
HPGP 101-C Y Y Y Y Y

Benefits

Reduced Cost

Identify particles in gases before they affect yield

Speed qualification of process gas distribution systems

Compatible with hydrogen, oxygen, and the majority of non-toxic gases

Improved Process Control

Accurate particle sizing

Facility Net data management software offers extensive data management, storage, reporting, and alarms

Verify gas quality

Detect process upsets

Quantify the impact of system changes

Reliable

Passive cavity design requires infrequent maintenance

Inert gas purge ensures safety

When sample gas leaks into the vessel, the power to the electronics is discontinued

Features

Parallel processing array detector system

Safety containment vessel

Oxygen and hydrogen compatibility

CE and RoHS 2 compliant

0.1 µm sensitivity at 0.1 SCFM

8 particle channels

Line pressures from 40 to 150 psig

Passive laser cavity

Applications

Qualification of gas distribution systems

Process gas monitoring

Reactive gas monitoring

Specifications

Source: Particle Measuring Systems

HPGP 101-C
Size channels 8 channels with thresholds at: 0.1, 0.2, 0.3, 0.5, 1.0, 2.0, 3.0, 5.0 μm
Sample rate 0.1 SCFM (2.8 LPM) (=total volumetric flow rate)
Counting efficiency* > 50 % at 0.14 μm
Zero count level < 2/ft3 or < 0.2/min
Maximum concentration** 3,000/ft3
Laser type HeNe
Calibration Traceable to the US National Institute of Standards and Technology (NIST).
Power 100, 115, 220 – 230, or 230 – 240 V, 50 – 60 Hz, 0.5 A
Environment Temperature: 32 – 113 °F (0 – 45 °C). Humidity: non-condensing. Maximum altitude: 9,842 ft (3,000 m).
Dimensions (l, w, h) 26 x 8 x 9 in (66 x 20 x 22 cm)
Weight 45 lb (20.4 kg)
Compliance CE, RoHS 2
PDS-E (Data Interface)
Number of sensors Supports 1 HPGP unit per PDS-E
Sampling interval 1 sec to 8 hr
Computer interface RS-232, bi-directional; Ethernet (via PMS protocol, Modbus, or OPC)
Power 100 – 240 VAC, 50 – 60 Hz, 0.63 A
Environment Temperature: 32 – 113 °F (0 – 45 °C), Humidity: non-condensing, Maximum altitude: 9,842 ft (3,000 m)
Dimensions (l, w, h) 7 x 8.5 x 12.5 in (18 x 22 x 32 cm)
Weight 11.5 lb (5.2 kg)

* Allow ± 5 % for variations in sample flow.** Greater than 90 % accuracy (less than 10 % coincidence loss) at maximum recommendation ambient concentration.

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