Reactive Ion Etch System - Phantom III
The Phantom III RIE (reactive ion etch system) is designed to supply research and failure analysi……...

AMECA is a world leading supplier of microanalytical and metrology instrumentation for research and process control. Our instruments measure elemental and isotopic composition in materials down to atomic resolution and equip government and university labs as well as high-tech industrial companies around the world. Learn how we address challenging characterization needs in diverse markets: semiconductor, nanotechnology and novel materials, nuclear science, energy, biology, environment, mining, geology.
From its inception in 1929, CAMECA has been renowned for its precision mechanics, optics and electronics. The company started in France as a manufacturer of movie theater projectors, before rapidly evolving into a provider of scientific instrumentation for the international research community and in-fab / near-fab metrology solutions for the semiconductor manufacturing industry.
Since pioneering Electron Probe MicroAnalysis (EPMA) in the 1950's and Secondary Ion Mass Spectrometry (SIMS) in the 1960's, CAMECA has remained the undisputed world leader in these techniques while achieving numerous breakthrough innovations in complementary techniques such as Low energy Electron induced X-ray Emission Spectrometry (LEXES), and Atom Probe Tomography (APT).
Operating under ISO 9001 certification, CAMECA controls not only the technology, but all aspects in the design, manufacture, installation and servicing of its products. Located at our headquarters near Paris, France, as well as at our Atom Probe Technology Center in Madison, Wisconsin, USA, our plants are state of the art facilities, using the best practices for clean room production, computer networking, electron and ion optics simulation and advanced CAD.
CAMECA has sales & service locations in Brazil, China, Germany, India, Japan, Korea, Taiwan, USA, and a wide network of agents, ensuring the best level of support to all users. Our mission is to focus on instrumental development to offer our customers the highest analytical performance in their specialized characterization fields.
CAMECA is a business unit of AMETEK, Inc., a leading global provider of electronic instruments and electromechanical devices, as part of the AMETEK Materials Analysis Division.
The Phantom III RIE (reactive ion etch system) is designed to supply research and failure analysi……...
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