ZEISS SmartSEM for SEM, FE-SEM and FIB-SEM

Users can employ SmartSEM from ZEISS to fully control all operational parameters. They can also select between different operating modes for the GUI based on their user level: complete control of all operating parameters enables users to set a few levels of software control for various users.

On the other hand, a brief GUI was developed for the occasional user with significant operating controls in one favorably arranged control bar for simple operation and enhanced productivity. Users can expand the functionality easily at all times with additional modules available for extensive image acquisition, processing, analysisand documentation.

Highlights

SmartSEM

Users can process wide signals at the time of acquisition or on stored images

Save operating conditions at all times for future recall

Utilize complete annotation and measurement abilities

Benefit from the extensive stage control

Users can make use of the Macro-Editor with access to more than 250 instrument control functions

SmartPI

Users can switch easily between various modes for production, configurationand report

Use the SmartPI module to measure, categorizeand quantify particle size, shape, morphologyand elemental composition in a semi-automatic manner

Configuration mode: Easily configure the appropriate settings from SEM setup to particle classification and report

Production mode: SmartPI automatically fixes the operating conditions and commences the measurement as per the selected analysis routine

Report mode: Make reports, process dataand function with single frame interactive analysis with anomaly analysis

SmartBrowse

Combined images were taken with a range of different detectors at various magnifications to present huge image sets in the sample context

Image properties can be assessed with all system parameters

Users can easily browse and navigate their image collection with the help of stage coordinate references

Hidden data can be disclosed with various viewing modes and filtering mechanisms

Users can tackle tilt series making the impression of a 3D rotation to get a better understanding of their sample