X-417: Granit-Based XYZ Motion and Positioning System for Laser Machining

For industrial applications with high demands on dynamics and precision, the X-417 multi-axis system provides an integrated solution. Systems from XY or XYZ with the appropriate ACS high-performance controller from PI are available. The system comprises two V-417 high-load linear stages with linear motors and absolute-measuring linear encoders.

Combining different travel range variants is possible: 204 mm to 407 mm. Granite plates are also offered for the XY systems. For the XYZ systems, the Z axis is an L-412 high-load linear stage with a 102 mm travel range, synchronous servo motor, and holding brake.

The adapter bracket needed to secure the Z axis to the granite base is part of the delivery for the XYZ systems that also come with a granite plate as a base.

Features

Optional with granite base plate

Delivery includes extensive test reports

Extensive accessories and software support are available

XY system is made of two V-417 positioners, with travel ranges from 204 to 407 mm

XYZ system with L-412 positioner as Z axis, 102 mm travel range

Suitable G-901 ACS controller with ACS driver module

X-417.0xx: XY system with G-901 2-axis controller.

X-417.0xx: XY system with G-901 2-axis controller. Image Credit: PI (Physik Instrumente) LP

X-417.1xx: XY system on granite plate (image without controller).

X-417.1xx: XY system on granite plate (image without controller). Image Credit: PI (Physik Instrumente) LP

X-417.2xx with accessories: XYZ system on granite plate (image without controller); X-417.Z02 breadboard set.

X-417.2xx with accessories: XYZ system on granite plate (image without controller); X-417.Z02 breadboard set. Image Credit: PI (Physik Instrumente) LP

X-417.2xx with accessories: XYZ system on granite plate, G-901 3-axis controller; X-417.Z02 breadboard set, X-417.Z01 base frame.

X-417.2xx with accessories: XYZ system on a granite plate, G-901 3-axis controller; X-417.Z02 breadboard set, X-417.Z01 base frame. Image Credit: PI (Physik Instrumente) LP

Cable Management

All systems are delivered with a suitable cable set. Each axis drive cable in the cable set is 5 mlong. A shorter cable set of 2 m is available as an accessory if shorter cables are necessary, such as when putting the controller in the base frame.

Application Fields

Laser Machining

Electronics production; Ultrashort pulse laser machining; Laser micromachining; Galvo integration; Laser ablation; Test and inspection; Ceramics and diamond cutting; Laser drilling; Laser welding.

Options and Accessories

Additional cable set for XYZ system: Cable length for X/Y axes 2 m, for Z axis 3 m

Software support, e.g.for SPS integration

Base frame

Breadboard set for granite plate

Adapter bracket

Specifications

Source: PI (Physik Instrumente) LP

General	X-417.0xx	X-417.1xx	X-417.2xx	X-417.3xx	Unit
Active axes	2	2	3	3
Controller	G-901.R519	G-901.R519	G-901.R5197	G-901.R5197
Granite base	–	1100 mm × 900 mm × 150 mm	1100 mm × 900 mm × 150 mm	–
Cable length	5	5	5	5	m
Max. workpiece size on XY system	–	–	300 mm × 300 mm × 100 mm	300 mm × 300 mm × 100 mm
Operating temperature range	5 to 40	5 to 40	5 to 40	5 to 40	°C
Humidity	Max. 80% rel., not condensing	Max. 80% rel., not condensing	Max. 80% rel., not condensing	Max. 80% rel., not condensing

X axis: Lower positioner, Y axis: Upper positioner

Motion	X-417.x22	X-417.x32	X-417.x33	X-417.x42	X-417.x43	X-417.x44	Unit
Travel range (XY)	204 × 204	305 × 204	305 × 305	407 × 204	407 × 305	407 × 407	mm
1-D positioning accuracy (X / Y)⁽¹⁾	±1.5 / ±1.5	±1.5 / ±1.5	±1.5 / ±1.5	±1.5 / ±1.5	±1.5 / ±1.5	±1.5 / ±1.5	µm
XY orthogonality	30	30	25	25	20	20	µrad
Max. velocity (X / Y)⁽²⁾	1.5 / 2.0	1.5 / 2.0	1.5 / 2.0	1.5 / 2.0	1.5 / 2.0	1.5 / 2.0	m/s

Encoder options	X-417.xxx	Unit
Integrated sensor	Absolute-measuring linear encoder
Sensor signal	EnDat 2.2
Design resolution	0.001	µm
Minimum incremental motion	10	nm
Limit switch	–

Mechanical properties	X-417.x22	X-417.x32	X-417.x33	X-417.x42	X-417.x43	X-417.x44	Unit
Max. payload	15	15	15	15	15	15	kg
Mass (XY system)⁽³⁾	22	24	26	26	28	30	kg⁽⁴⁾
Mass (XYZ system, incl. granite base and adapter bracket)⁽³⁾	481	483	484	484	486	488	kg⁽⁴⁾

Z axis: L-412.059054B	in X-417.2xx	Unit
Travel range	102	mm
Positioning accuracy, uncalibrated (max.)	±6	µm
Minimum incremental motion	2	µm
Bidirectional repeatability (max.)	±3	µm
Velocity, unloaded (max.)	300	mm/s
Max. payload	15	kg
Holding brake⁽⁵⁾	Electromagnetic safety brake

Granite base	in X-417.1xx and X-417.2xx	Unit
Flatness	5	µm
Mass	430	kg⁽⁴⁾

⁽¹⁾Based on a measuring height of approx. 30 mm above the platform. Recommended ambient conditions for 1-D positioning accuracy: 21 °C ± 1 °C at 50 to 60 % relative humidity

⁽²⁾Values depend on application-specific parameters. For detailed information, contact PI.

⁽³⁾Without cable management

⁽⁴⁾± 5 %

⁽⁵⁾Safety coefficients for the holding brake are available on request

标签：Nanopositioning Systems

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