Wavelength Dispersive XRF Spectrometer - ZSX Primus 400

Rigaku's unique ZSX Primus 400 sequential wavelength dispersive X-ray fluorescence (WDXRF) spectrometer was specifically designed to handle very large and/or heavy samples that measure up to 400 mm in diameter, 50 mm in thickness and 30 kg in mass. This system is therefore an ideal solution for analyzing sputtering targets, magnetic disks and multilayer film metrology, or for the elemental analysis of large samples.

XRF with Customized Sample Adapter System

This WDXRF spectrometer is highly versatile in its ability to adapt to specific sample types of various sizes and shapes through the use of optional adapter inserts that are made to order. Additionally, this instrument is also able to adapt to different analysis requirements. With a variable measurement spot whose diameter ranges from 30 mm to 0.5 mm, a 5 step automatic selection and mapping capability with multi-point measurements to check for sample uniformity makes this WDXRF spectrometer a uniquely flexible instrument can dramatically streamline your quality control processes.

XRF with Available Camera and Special Lighting

Optional real-time camera allows the analysis area to be viewed within software, thereby providing the operator with complete certainty and control over the sample being measured and analyzed.

Traditional WDXRF Analytical Capabilities

The same analytical capabilities of a traditional instrument are retained in this "large sample" variant. These capabilities include a high resolution and precision analysis of elements ranging from beryllium (Be) to uranium (U) using WDXRF spectroscopy, as well as samples that are solids, liquids, powders and even thin films that are in the composition sizes ranging from ppm to tens of percent, as well as a wide range of thicknesses from sub Å to mm.

The diffraction peak interference rejection is also available to achieve optimal results for single-crystal substrates. The Rigaku ZSX Primus 400 wavelength dispersive X-ray fluorescence (WD-XRF) spectrometer complies with industry standards SEMI and CE.

ZSX Primus 400 Applications

Sputtering target composition

Isolation films: SiO₂, BPSG, PSG, AsSG, Si₃N₄, SiOF, SiON, etc.

High-k and ferro-dielectric films: PZT, BST, SBT, Ta₂O₅, HfSiOx

Metal films: Al-Cu-Si, W, TiW, Co, TiN, TaN, Ta-Al, Ir, Pt, Ru, Au, Ni, etc.

Electrode films: doped poly-Si (dopant: B, N, O, P, As), amorphous-Si, WSix, Pt, etc.

Other doped films (As, P), trapped inert gas (Ne, Ar, Kr, etc.), C (DLC)

Ferroelectric thin films, FRAM, MRAM, GMR, TMR; PCM, GST, GeTe

Solder bump composition: SnAg, SnAgCuNi

MEMS: thickness and composition of ZnO, AlN, PZT

SAW device process: thickness and composition of AlN, ZnO, ZnS, SiO₂ (piezo film); Al, AlCu, AlSc, AlTi (electrode film)

ZSX Primus 400 Accessories

Sample camera with special lighting to allow for ease of view of the analysis point

Diffraction interference rejection provides accurate results for single-crystal substrates

Fundamental Parameters software for the analysis of thin films

Product Features

Large sample analysis

~ 400 mm in diameter

~ 50 mm in thickness

~ 30 kg in mass)

Sample adapter system

Adaptable to various sample sizes

Measurement spot

Diameter range of 30 mm - 0.5 mm

5-step automatic selection

Mapping capability provides multipoint measurements

Optional sample view camera

General purpose

Analyze elements ranging from Be - U

Elemental range: ppm to %

Thickness range: sub Å to mm

Optional diffraction interference rejection

Accurate results for single-crystal substrates

Compliance with industry standards

SEMI, CE marking

Small footprint

50% footprint of the previous model

ZSX Primus 400 Specifications

.	.	.
Outline	Elemental range	4Be – 92U
	Optics	Wavelength dispersive
X-ray generator	X-ray tube	End window type, Rh-anode4 kW
	High voltage generator	High frequency inverter systemMax. Rating: 4 kW, 60 kV – 150 mA
Spectrometer	Maximum sample size	400 mm diameter, 50 mm height, ≤30 kg.Optional adapters are available for various sizesamples with irregular shapes.
	Primary X-ray filters	Automatic exchanger (Max. 7 filter)Ni400, Ni40, Al125, Al25 (standard)Ti, Sn (Diff action interference rejection, optional)Be30 (Protection of X-ray tube, optional)
	Analysis area diaphragm	30, 20, 10, 1, 0.5 mm φ
	Crystal exchanger	Maximum 10 crystals
Measurement	Detector	Heavy elements: SCLight elements: F-PC

Installation Requirements

.	.
Power	3 phase 200/208 V 50 A,Single phase 100-240 V 50/60 Hz (PC)
Ground	Independent ground with resistance less than 30 Ω
Cooling water	Quality: Equivalent to drinking waterTemperature: Lower than 30 ˚CPressure: 0.29-0.49 MPaFlow: More than 5 L/min
Drainage	Open drainage
Room temperature	15-28 °C with daily variation within ±2 ˚C
Humidity	Lower than 75% RH
Vibration	Lower than human sensitive level
P-10 gas	Ar 90% Methane 10% Mixture gas pressure 0.15 MPa



Rigaku ZSX Primus Series WDXRF spectrometersPlay

Wavelength Dispersive XRF Spectrometer - ZSX Primus 400

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