Verios 5 XHR SEM - High Material Contrast for Nanomaterial Characterization

The Verios 5 XHR SEM provides subnanometer resolution over the full 1 keV to 30 keV energy range with unmatched materials contrast. Unrivaled levels of automation and ease of use make this performance accessible to all users, regardless of their level ofexperience.

Scanning Electron Microscopy Characterization

Consistent measurement results with ConstantPower lenses, electrostatic scanning and a choice of two piezoelectric stages.

It can accommodate for accessories with a large chamber.

Greatly reduced time to nanoscale information for users with any experience level using the Elstar electron column featuring SmartAlign and FLASH technologies.

High-resolution nanomaterial imaging with the UC+ monochromated electron source for sub-nanometer performance from 1-30 kV.

High contrast on sensitive materials with excellent performance down to 20 eV landing energy andhigh-sensitivity in-column and below-the-lens detectors and signal filtering for low-dose operation and optimal contrast selection.

Unattended SEM operation withThermo Scientific AutoScript 4 Software, an optional Python-based application programming interface.

Verios 5 XHR Scanning Electron Microscope Features

SmartAlign Technology

By removing the need for any user alignments of the electron column, SmartAlign technology reduces maintenance and boosts productivity.

Sub-Nanometer Resolution

The sub-nanometer resolution of Elstar Schottky monochromated (UC+) FESEM ranges from 1 to 30 keV.

Low Dose Operation and Optimal Contrast Selection

Advanced suite of high-sensitivity, in-column andbelow-the-lens detectors and signal filtering for low-dose operation and optimal contrast selection.

Unattended SEM Operation

An optional Python-based application programming interface is available with AutoScript 4 Software (API).

Innovative Electron Optics

Features Thermo Scientific’s patented UC+ gun (monochromator), ConstantPower lenses, and electrostatic scanning for accurate and stable imaging.

Consistent Measurement Results

With its ability to calibrate to a NIST-certified standard at high magnification, the Verios is ideal for lab-based metrology applications.

Easy Access to Beam Landing Energies

As low as 20 eV with very high resolution for true surface characterization.

Large Chamber

With two accurate and reliable piezo-driven stages to choose from.

Specifications

Source: Thermo Fisher Scientific – Electron Microscopy Solutions