Verifire™ XL: Turnkey Interferometer Workstation

The Verifire XL is a turnkey interferometer workstation with a large aperture and a small footprint for testing plano optics up to 300 mm in diameter.

This completely integrated system is simple to operate, with a heavy-duty tip/tilt stage that allows for repeatable part placement without custom fixturing.

The small footprint, built-in vibration isolation, and controller monitor stand necessitate little production floor space.

More Info

Stand-alone large aperture workstation for evaluating plano optical surface forms with diameters of up to 12 inches (300 mm), such asmirrors, semiconductor wafers, windows, wafer chucks, and blocked flats.

Image Credit: Zygo Corporation

Key Features

12" (300 mm) downward-facing aperture for effortless part handling and alignment

Turnkey, self-contained system comprised of an interferometer mainframe, a passive vibration isolation system, a test part alignment stage, and a 1/15^th wave PVr transmission flat (TF)

Compact footprint saves valuable floor space

Embedded vibration isolation and QPSI^TM technology for accurate measurements in manufacturing environments