Verifire™ XL: Downward-Looking Interferometer

A turnkey interferometer workstation with a large aperture and a compact footprint, the Verifire XL makes it simple to test plano optics up to 300 mm in diameter.

With its heavy-duty tip/tilt stage and user-friendly design, this fully integrated system offers reproducible part placement without needing custom fixturing.

The small footprint, with built-in vibration isolation and a controller monitor station, requires less production floor area.

More Info

This large aperture workstation is self-contained for measuring plano optical surfaces up to 12 inches (300 mm) in diameter, such as mirrors, windows, semiconductor wafers, wafer chucks, and blocked flats.

Image Credit: Zygo Corporation

Key Features

12” (300 mm) downward-facing aperture for simple part handling and positioning

Interferometer mainframe, passive vibration isolation system, test part alignment stage, and 1/15^th wave PVr transmission flat (TF) are all included in a turnkey, self-contained system

The small footprint conserves valuable floor space

Integrated vibration isolation and QPSI^™ technology for reliable measurements in manufacturing environments