Verifire™ Asphere+: Measure a Range of Axisymmetric Aspheres

Aspheric optics have offered considerable advantages in designing and implementing imaging, sensing, and laser systems utilized in semiconductor exposure, industries from defense and aerospace, inspection systems, and medical imaging systems.

Production of aspheres that assist such applications is based on precision metrology. Ultimately, users cannot make what they cannot measure regarding aspheric optics.

The Verifire^™ Asphere+ (VFA+) leverages the advantages of Fizeau interferometry to offer a unique combination of precise, fast, high-resolution, and complete aperture metrology for axisymmetric aspheres.

The VFA⁺ offers an adaptable metrology platform to quantify a range of axisymmetric aspheres witha change of the transmission sphere. The VFA⁺ has been fitted with an optional secondary stage which assists a computer-generated hologram (CGH), expanding the asphere shape ability to nonsymmetric free forms and off-axis aspheric optics.

Having a focus on improving the user experience, users could easily set up new measurements, navigate measurement data and results, and diagnose production problems. Mx^™ Software allows efficient R&D and prototyping phases and enhances production applications with just a one-click setup, alignment, and measurement abilities.

Introduction to VFA+Play

Video Credit: Zygo Corporation

Other features of the VFA⁺

Flexible to multi-part automated measurement of trays of optics

Affordable asphere metrology solution that is later compatible—upgrade existing VFA systems to VFA⁺

Use as so-called “normal” Fizeau interferometer with extreme-precision radius of curvature rail