VELION: FIB-SEM Where FIB Truly Comes First

Focused Ion Beam (FIB) technology provides very versatile capabilities for manufacturing a number of materials. Therefore VELION is a FIB-SEM system dedicated to nanofabrication where FIB is the main techniques. Thus the instrument is highly optimized for fabricating high resolution, three dimensional nanostructures like lenses, plasmonic devices, localized implantation, metamaterials, nanofluidics, and more.

With the support of a tailored FE-SEM column and Raith’s high-precision laser interferometer stage, VELION allows for very versatile use in four different operation modes. FIB nanofabrication, sample preparation, process control, and e-beam lithography are now possible with a single tool.

The unique architecture makes VELION a FIB prioritized system, designed to meet the most demanding nanofabrication requirements. It provides a variety of direct FIB processing methods with the unparalleled stability, reproducibility, automation, and high resolution of a lithography instrument.

Image credit: Raith

FIB methods can make nanofabrication more efficient by using direct patterning (milling, etching, deposition) or hard masking, and enable new processes based upon maskless ion implantation or surface functionalization. VELION is the result of developments to answer to the fast- growing interest in ion beam based nanofabrication in various areas of R&D. Its unique nanoFIB Three ion column delivers superior placement accuracy, high resolution, long-term stability and record low beam tails. The tailored FE-SEM column as well as further options such as gas injection systems, nanoprobers, and EDX support the FIB processes and majorly expand the application range.

VELION Product Details

Main Uses

Direct and 3D FIB techniques

Gas-free FIB nanofabrication

Nanoengineering platform

Sample preparation

SEM inspection and lithography

Stage

4” full travel

Large Z travel

Rotation and tilt sample holder

Other tilt setups

Column Technology

nanoFIB Three

IONselect

Ion column 35 kV Ga (Au, Si, Ge)

FE-SEM column 30 kV

Unique Writing Mode

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Focused Ion Beam Benefits

True 3D direct patterning, also on topographic samples

Simplified processes and process development for quickest time to results

Versatile FIB methods for challenging or new materials

Advanced FIB Nanofabrication

Guaranteed sub-10 nm FIB nanofabrication and outstanding beam spot characteristics

Multiple ion species beyond gallium (IONselect technology)

Lithography-class stability and accuracy over extended periods of time and areas

Laser interferometer stage for maximum precision and true field stitching or continuous patterning

SEM and more

SEM inspection for in-situ process control

Live-imaging during TEM sample preparation

Gas-assisted processes, manipulation, and probing

Configurable Setups for Extended Versatility

With numerous universal ports on the vacuum chamber, VELION supports a configurable setup that has the ability to be upgraded in the future. As well as other features, the FIB-SEM system can be fitted with a range of multiline and mono-line gas injection systems. Inclusion of multiple GISs from opposite directions allows for gas-induced processes such as wiring of nanoobjects and X-section analysis. Gas-assisted etching offers better selectivity, improved removal rates, and less redeposition.

An additional new feature is a nanoprofilometer as an add-on option, which allows both 3D process control and lateral secondary electron imaging information. The 3D surface imaging solution nanoSense helps to qualify etching, deposition, and milling processes in situ within minutes. Additional options include various optical cameras, sample auto height sensing, plasma sample cleaner, EDX, and more.

CAD view of a VELION setup including SEM, SE and EDX detector, 5-channel and two single line GIS, optical macroscope as well as two nano manipulators.Image credit: Raith

IONselect Technology - FIB Nanofabrication Beyond Gallium

The nanoFIB Three technology is used for continous delivery of silicon, gold, or other ions with nanometer beam diameters. The flow-enhanced alloy ion source and low-aberration ion optics allow easy switching between numerous ion species from a single source, while maintaining the high resolution and stability of the nanoFIB Three column.

IONselect provides a variety of species, from doubly charged light ions to heavy ions and clusters - all with superior handling and enabling different yet-to-be-explored nanofabrication methods. Processing that involves specific functionalization, low contamination, higher resolution, or surface sensitive milling will open doors for new breakthroughs in next-generation research.

VELION - FIB-SEM where FIB truly comes firstPlay

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VELION: FIB-SEM Where FIB Truly Comes First

1-mm long fluidic channel fabricated by milling with stitchingThe 3-dimensional shape of a special antireflective grating is revealed by X-section analysis (Image Credits: Bilkent University)SEM control of a test array on a membraneDirect FIB milling for a 3-dimensional absorber structure (Image Credits: Zhejiang University)Part of a wave guide and photonic crystal pattern in resistFIB cutting sub-10 nm features in challenging materials like polycrystalline gold (Image Credits: University of Stuttgart)High-resolution imaging of plasmonic features created by FIB milling (Image Credits: University of Stuttgart)TEM lamella preparation by in-situ lift out (Image Credits: NMI Reutlingen)Write field stitching allows for direct milling of long waveguides with offsets on the 10 nm scale only (Image credits: Peking University)