V-610: Compact, Fast Rotary Table for Precision Test and Manufacture

The high-speed, direct-drive rotation stages from PI (Physik Instrumente) LP have been fitted with brushless, frictionless, and closed-loop torque motors. The availability of such fast rotary tables offers the ideal combination of high velocity, high precision, and utmost service life.

PI offers closed-loop direct-drive rotary tables with mechanical and air bearings. The stage model comes with a low profile and large apertures. The stage design has been improved for high stiffness, speed, and load capacity.

Air-bearing rotation tables are recommended if maintenance-free and friction-free motion with anunlimited lifetime is needed. Such ultra-precision, high-speed rotary tables offer vibration-free motion with extremely high precision and negligible runout, wobble, and eccentricity errors.

The deficiency of lubricants makes these clean rooms consistent and ideal for any high-performance metrology application in photonics, optics, and semiconductor manufacturing, test, and metrology-related projects.

Advantages of Motorized Direct-Drive Rotation Stages: Speed, Precision, Reliability

In opposition to belt-drive rotation stages or worm gear-driven rotary stages, the quick, direct-drive stages remove play in gears, couplings, or flex in drive belts, offering accurate rotary motion with zero backlash and outstanding constancy of velocity while obtaining higher speed compared to worm-gear drives.

Applications for Direct-Drive, High-Speed Rotation Stages

High-speed rotary tables are utilized in high-performance factory automation, semiconductor, and laser processing applications and research. As a result of the use of brushless, high-torque motors with instant metrology position feedback, a backlash is entirely removed, and reliability has been greatly enhanced.

The Difference Between a Rotary Table and Rotary Stage

Generally, there is no variance. With the availability of greater models, a table is utilized more often, while smaller-size models are often referred to as stages.

What Angular Positioning Resolution can be Achieved?

With the availability of modern direct-metrology rotary encoders, sensor resolution down to 1/100^th of a microrad is available on chosen models with large rotary table platforms. This utilizes the high interpolation factors of modern closed-loop brushless motors like what is offered by the PI’s EtherCat-based controllers.

Depending on the high encoder resolution and robust servo controllers, the direct-drive rotary tables also offer outstanding velocity control. This is needed in automation applications like high-speed laser processing, indexing, and semiconductor wafer inspection.

The majority of the Direct Drive Rotation stages could be mounted vertically and horizontally, with combinations of all 3 rotary degrees of freedom (3DOF, yaw, pitch, and roll) being addressed.

Compact Precision Direct-Drive Rotation Stages with Brushless Torque Motors and Mechanical Bearings

V-610 High Precision Rotation Stage

Direct Drive and Direct Encoder

Availability of 27 µrad min. inc. motion

Comes with a 25 mm aperture, 100 mm turn table

Max. velocity is around 540°/sec

The load can be taken up to 2 kg

An optional brake is offered

Torque motor, sine/cosine encoder

Image Credit: PI (Physik Instrumente) LP

V-611 High Precision Rotation Stage

Direct Drive, Absolute Encoder Option

Aperture is around 35 mm, 100 mm turn table

1 µrad min. inc. motion

Torque motor

Maximum velocity is 2880°/seconds

Sine/cosine or absolute encoder

The load is 10 kg

Image Credit: PI (Physik Instrumente) LP

V-62× Ultra-High Precision Rotation Stages

Direct Drive, Absolute Encoder Option

Comes with an 85/110 mm turn table

Max resolution is 0.0015 µrad

A torque motor is available

Sine/cosine or absolute encoder

The load is 15 kg

Max. velocity is 7200°/seconds

Image Credit: PI (Physik Instrumente) LP

Ultra-High Performance Direct-Drive Air Bearing Rotary Tables with Brushless Torque Motors

A-621-A-627 Air Bearing Rotary Stages

Direct Drive, High Load

The table diameter is given to be 2/4/6/8/12″

Load is 13 to 420 kg

Max. resolution is 0.008 µrad

RPM max is 500 to 2500

Flatness is 40 to 100 nm

Image Credit: PI (Physik Instrumente) LP

A-634–A-638 Air Bearing Rotary Stages

Low Profile, Large Diameter

Table diameter is 6/8/14″

The load capacity is 20/32/60/120 kg

Self-locking option at rest

Max. resolution is 0.03 µrad

Eccentricity and flatness <100 nm

500 RPM max.

Image Credit: PI (Physik Instrumente) LP

A-688 Air Bearing Rotary Stage

Large Clear Aperture

Clear aperture is ⌀260 mm

Load capacity is 77 kg

Max. resolution is 0.0015 µrad

Direct drive

500 RPM max.

Wobble: <1 µrad

Flatness/Eccentricity <175/300 nm

Image Credit: PI (Physik Instrumente) LP