V-308: Fast Focus Nanopositioning Stage for Surface Metrology and Microscopy

上海仪舶实验室自动化 25-01-23 12:47:50

V-308: Fast Focus Nanopositioning Stage for Surface Metrology and Microscopy

The V-308 rapid focus nanopositioning stage has a resolution of 10 manometers and is intended for surface metrology and microscopy.

Features include:

Adjustable travel range limitation to a total of 1 to 7 mm

The user can adjust integrated weight force compensation to 1 kg

High-dynamics direct drive

Heavy-duty crossed roller guide

Minimum incremental motion of 10 nm

Suitable optional accessories, e.g., objective holders

V-308 Voice Coil Focus Drive for Precision Industrial Automation

Video Credit: PI (Physik Instrumente) LP

V-308 Voice Coil PIFOC for Microscopy & Life Sciences

Video Credit: PI (Physik Instrumente) LP

V-308.753030: Measurement for proving the minimum incremental motion of 10 nm.

V-308.753030: Measurement for proving the minimum incremental motion of 10 nm. Image Credit: PI (Physik Instrumente) LP

V-308 settling time with 250 g load at a step of 100 nm in an error band of +/-15 nm.

V-308 settling time with 250 g load at a step of 100 nm in an error band of +/-15 nm. Image Credit: PI (Physik Instrumente) LP

V-308.753030, dimensions in mm.

V-308.753030, dimensions in mm. Image Credit: PI (Physik Instrumente) LP

V-308 with V-308.AP1 adapter plate, V-308.OH1 objective holder, P-725.11L thread adapter, and objective.

V-308 with V-308.AP1 adapter plate, V-308.OH1 objective holder, P-725.11L thread adapter, and objective. Image Credit: PI (Physik Instrumente) LP

Product Description

Z Positioning of Objectives With PIFOC

Many examinations or microscopy technologies need sample positioning in the Z direction, i.e., along the optical axis of the objective. It is also possible to shift the objective itself in the Z direction. PI provides PIFOC solutions for this purpose.

Integrated Weight Force Compensation

The product has magnetic weight force compensation. Even when no power is applied, this keeps a load of up to 1 kg aligned vertically to the motion axis. The user can adjust the weight force compensation.

PIMag® Voice Coil Motor

Voice coil motors are direct drives. The force of the drive element is delivered directly to the load to be moved in direct drives, which do not employ mechanical transmission elements, such as a coupling, drive screw, or gearhead.

Voice coil drives comprise a permanent magnet and a winding body positioned in the magnetic field’s air gap. When current runs through the winding body, it moves in the permanent magnet’s magnetic field.

Voice coil drives are ideal for applications requiring high dynamics and high velocity over short ranges due to their low weight and friction-free drive principle. Because these drives are hysteresis-free, they can also support high scan frequencies and precision positioning.

Crossed Roller Guide

The line contact of the toughened rollers in crossed roller guides replaces the point contact of the balls in ball guides. As a result, they are significantly stiffer and require less preload, which lowers friction and allows for smoother running. Crossed roller guides also have a high guiding accuracy and load capacity. Cages with force-guided rolling elements avoid cage creep.

Direct Position Measuring

Nonlinearity, mechanical play, or elastic deformation do not affect position measuring because it is carried out directly at the motion platform with utmost accuracy.

Application Fields

Microscopy

Multiphoton fluorescence microscopy, deep tissue inspection, digital slide scanning microscopy.

Biotechnology

Genome sequencing with the Solexa-Illumina method, Immuno-Assay fluorescence.

Medical Devices

Scanning laser ophthalmology, automated cell counters/flow cytometers.

Biomedical Research

Optical and magnetic tweezers.

Laser Materials Processing

Laser micromachining, laser ablation.

Semiconductor Industry

Semiconductor/wafer inspection.

Specifications

Source: PI (Physik Instrumente) LP

Motion V-308.753030 Tolerance
Active axes Z
Travel range in Z 7 mm
Acceleration in Z, unloaded 8 m/s² max.
Maximum velocity in Z, unloaded 200 mm/s
Flatness (Linear crosstalk in X with motion in Z) ± 0.75 µm max.
Straightness (Linear crosstalk in Y with motion in Z) ± 0.75 µm max.
Yaw (Rotational crosstalk in θX with motion in Z) ± 50 µrad max.
Pitch (Rotational crosstalk in θY with motion in Z) ± 50 µrad max.
Roll (Rotational crosstalk in θZ with motion in Z) ± 50 µrad max.
Positioning V-308.753030 Tolerance
Integrated sensor PIOne: Incremental linear encoder
System resolution in Z 1 nm
Bidirectional repeatability in Z ± 0.5 µm typ.
Bidirectional repeatability in Z, 100 nm step ± 25 nm
Positioning accuracy in Z, calibrated ± 0.6 µm typ.
Positioning accuracy in Z, uncalibrated ± 4 µm typ.
Minimum incremental motion in Z 0.01 µm typ.
Settling time in Z (100 nm step, ± 15 nm error band) 15 ms
Settling time in Z (250 nm step, ± 15 nm error band) 15 ms
Position noise in Z 3 nm max.
Sensor signal Sin/cos, 1V peak-peak
Sensor resolution 1 nm
Sensor signal period 2 µm
Reference switch Optical, direction sensing (reference edge track), 5 V, TTL
Reference switch repeatability 0.5 µm
Drive Properties V-308.753030 Tolerance
Drive type Voice coil
Nominal voltage 48 V
Nominal current, RMS 1.15 A typ.
Peak current, RMS 3.5 A typ.
Drive force in negative direction of motion in Z 4.2 N typ.
Drive force in positive direction of motion in Z 4.2 N typ.
Peak force in negative direction of motion in Z 9.45 N
Peak force in positive direction of motion in Z 9.45 N
Force constant 2.7 N/A
Motor constant 1.37 N/√W typ.
Resistance phase-phase 3.9 Ω typ.
Inductance phase-phase 0.85 mH
Back EMF 2.7 V·s/m max.
Permissible maximum temperature for positioner components 50 °C
Mechanical Properties V-308.753030 Tolerance
Guide Crossed roller guide
Moved mass in Z, unloaded 200 g
Permissible push force in X 10 N max.
Permissible push force in Y 10 N max.
Permissible push force in Z 10 N max.
Overall mass 600 g
Mass without cable 450 g
Material Aluminum, anodized
Miscellaneous V-308.753030 Tolerance
Connector HD D-sub 26-pin (m)
Recommended controllers / drivers

C-414, G-910, ACS SPiiPlus + NPMpm (NanoPWM incl.)

Cable length 1.5 m
Operating temperature range 10 to 50 °C

Note on sensor resolution and minimum incremental motion: With C-414 motion controller at an interpolation of 211Note on settling time: With gain scheduling (only with NanoPWM)>Note on positioning accuracy and repeatability: Following ISO 230-2Note on nominal current, peak current: Max. 10 s at 70 °C coil temperatureNote on nominal current, RMS: Value without cooling; with cooling: 1.55 A; with horizontally aligned positioner, with perforated plate made of steel, 200 mm × 250 mm × 12 mmNote on inductance: Value at 100 mHzThe specifications apply to room temperature (22 °C ± 3 °C). The specifications can deviate outside of this range.

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