Using the ZMI™ Series for OEM Applications

ZYGO^® is a leader in technology and application support in heterodyne displacement interferometry. The company offers comprehensive solutions and support for OEM metrology application with its ZMI™ Series Displacement Measuring Interferometers. For a number of years the OEM products and technologies of the company have been field-proven in leading edge production facilities.

Key Features

The key features of the ZMI™ series are as follows:

Heterodyne displacement interferometry

Highly robust for OEM applications

Easy to align, highly stable, and insensitive to signal amplitude changes

A single laser source capable of supporting multiple axes

High signal-to-noise phase measurements enable high precision and remove false counts, even at zero slew rates

Typical Applications

The typical applications of the ZMI™ series are as follows:

Calibration: Measurement and calibration of high resolution or high frequency mechanical motions

Process equipment: probers, memory repair tools, drilling tools, and die bonders

Metrology tools: Wafer, mask, and LCD measurement and inspection tools, and CD-SEMs

Lithography tools: e-beam and laser mask writers, scanners, and optical steppers

Configure the system to suit specific needs:

ZYGO^® offers a range of

Laser heads

Measurement electronics

Interferometers and optics

Cables and feedthroughs

This modular technique enables users to configure a system that best suits their needs by selecting the most suitable components.