NanoMEMS Research, LLC
NanoMEMS Research, LLC engages in RF MEMS and Nanotechnology research, consulting, and education.……...

The UPR-270 Air features best value for wobble and flatness and one can reach high accuracy because of high-precision air bearing.
All rotation stages UPR-270 AIR are directly driven by a torque motor. The UPR-270 AIR is equipped with an angular scale system and reference switches. Standard resolutions up to 0.00002° can be achieved.
Key Features
The key features of the UPR-270 Air are:
Torque motor
Uni-directional repeatability down to 0.00003 °
Maximum speed 360 °/sec
Load capacity up to 40 kg
Integrated reference switches
Integrated angular scale
High precision air bearings
Free center hole 35 mm diameter
Eccentricity ± 0.07 µm
Wobble ± 1.25 µrad
Option: Clean room
NanoMEMS Research, LLC engages in RF MEMS and Nanotechnology research, consulting, and education.……...
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