Ultra-High Vacuum (UHV) Compatible Mass Spectrometer

The Extrel^® MAX-QMS System is a UHV-compatible flange mounted quadrupole mass spectrometer.

It is based on Extrel’s industry-leading mass spectrometer technology, which is designed around the company’s range of RF power supplies with 9.5 mm and 19 mm tri-filter mass filters. The quadrupole mass filter, ionizer, and detector on a mounting flange are built to fit into an experimental vacuum chamber.

The MAX-QMS mass spectrometer comprises a MAX-CS command system, rack mountable quadrupole power supply (QPS), and Merlin Automation Data System Software.

Merlin Automation™ Data System Software

The Merlin Automation Data System assists users to obtain the most from the Extrel quadrupole mass spectrometer. It operates in a Windows^® 7, or Windows^® 10 environment, and allows users to concurrently perform high-speed data acquisition and advanced data processing. It is highly versatile and can be customized for each application using simple and easy to write macros. The MAX system is packaged with all of the connecting components.

Key Features

The main features of the MAX-QMS are as follows:

Highly sensitive

Ideal for cutting edge research in gas analysis

Highly sensitive analysis of photocatalytically driven temperature programmed desorption

Extremely accurate and precise

Flexible system for any researcher requiring mass spectral data

Can perform small atomic analysis of gases

Real-time atmospheric monitoring of environmentally important compounds, such as CFCs

Applications

The main areas of application of the MAX-QMS are as follows:

Scattering

Plasma monitoring

Laser ablation studies

CVD process monitoring

Residual gas analysis

End point detection

Combustion analysis

Flow tube detection

Outgassing studies

Molecular beam studies

Bakeout/vacuum pumpdown

Catalysis

Atmospheric and marine research

Pyrolysis research

Dynamic SIMS

Emissions monitoring

Temperature Programmed Desorption