SET Corporation SA
SET, Smart Equipment Technology, is a world leading supplier of High Accuracy Die Bonders/Flip Ch……...
Ultra-High Accuracy Nano-Positioning Linear Stage with Linear Motor-N 565 from PI
This reference-class linear positioner comprises a self-clamping non-magnetic motor with sub-nanometer resolution.
High-accuracy is offered by crossed roller bearings and a direct measuring high-precision, sub-nanometer resolution linear encoder.
Key Features
Ultraprecision: 2 nm minimum incremental motion and direct-measuring PIOne encoder with 0.5 nm resolution
Long travel ranges: 13 mm, 26 mm or 52 mm
Self-locking when switched off: Saves energy and reduces generation of heat
Long lifetime and high reliability due to PiezoWalk® technology
Compact design: 65 mm width, 20 mm height
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