UVISEL Plus: The Reference Spectroscopic Ellipsometer
The Uvisel Plusoffers the best combination of modularity and performance for advanced thin film, ……...
UHV Vacuum Nanopositioning Stage from Physik Instrumente
The PI miCos stages can be designed for UHV and cryo applications. To reach a vacuum level of 10-9 mbar the material of the stages have to be selected carefully.
Special end switches for a wide temperature range and special 2 phase stepper motors with stainless steel housing, actively heated up to 120°C for outgasing can be adapted.
This nanopositioning stage provides precision positioning in UHV conditions. The specifications are as follows:
200 mm Positioning Range
±0.02 microns Reproducibility
100 mm/second Velocity
Payload to 35 kg
Linear scale encoder (center mounted)
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