UHV Vacuum Nanopositioning Stage from Physik Instrumente

The PI miCos stages can be designed for UHV and cryo applications. To reach a vacuum level of 10^-9 mbar the material of the stages have to be selected carefully.

Special end switches for a wide temperature range and special 2 phase stepper motors with stainless steel housing, actively heated up to 120°C for outgasing can be adapted.

This nanopositioning stage provides precision positioning in UHV conditions. The specifications are as follows:

200 mm Positioning Range

±0.02 microns Reproducibility

100 mm/second Velocity

Payload to 35 kg

Linear scale encoder (center mounted)