UHV Vacuum Nanopositioning Stage from Physik Instrumente

上海仪舶实验室自动化 25-01-23 12:57:13

UHV Vacuum Nanopositioning Stage from Physik Instrumente

The PI miCos stages can be designed for UHV and cryo applications. To reach a vacuum level of 10-9 mbar the material of the stages have to be selected carefully.

Special end switches for a wide temperature range and special 2 phase stepper motors with stainless steel housing, actively heated up to 120°C for outgasing can be adapted.

This nanopositioning stage provides precision positioning in UHV conditions. The specifications are as follows:

200 mm Positioning Range

±0.02 microns Reproducibility

100 mm/second Velocity

Payload to 35 kg

Linear scale encoder (center mounted)

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