Chart Industries, Inc.
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UHV Vacuum Nanopositioning Stage from Physik Instrumente
The PI miCos stages can be designed for UHV and cryo applications. To reach a vacuum level of 10-9 mbar the material of the stages have to be selected carefully.
Special end switches for a wide temperature range and special 2 phase stepper motors with stainless steel housing, actively heated up to 120°C for outgasing can be adapted.
This nanopositioning stage provides precision positioning in UHV conditions. The specifications are as follows:
200 mm Positioning Range
±0.02 microns Reproducibility
100 mm/second Velocity
Payload to 35 kg
Linear scale encoder (center mounted)
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