TurboDisc K465i GaN MOCVD System from Veeco Instrument

The TurboDisc® K465i™ GaN MOCVD System is the newest entry into Veeco's K-Series platform, which is production-proven and provides high productivity and for HB LED high-volume production fabs around the globe. The K465i achieves up to 90% yield (5nm bin) due to its superior uniformity and excellent run-to-run repeatability. K465i also offers the industry's highest productivity due to its full automation and shortened recovery period after maintenance.

Key Features

Combines the industry's highest capital efficiency with the highest productivity and best-in-class yields.

Based on production-proven, high throughput K465 platform

Incorporates new Uniform FlowFlange® technology for highest within wafer uniformity and ultimate process repeatability

The simplified design provides ease of tuning for fast production qualification and fast recovery after maintenance

Low maintenance TurboDisc® technology enables the highest system availability

Lowest cost of ownership for maximum profitability