Atomic Layer Etching — PlasmaPro 100 ALE
The PlasmaPro 100 ALE from Oxford Instruments provides accurate process control of etching for ne……...

TheTSu (Thermal Screening Unit)allows for the rapid screening of both thermal and pressure hazards in reaction mixes and samples on the same compact platform. It typically finds application in:
This is due to its ability to characterize sample pressure changes in addition to thermal behavior, and its capability in supporting relatively large sample measurements. As such, it can be considered a superioralternative, technique to the classical DSC/DTA (Differential Scanning Calorimetry/Differential Thermal Analysis) methods.
Features and Options
Test Cell Type and Volume
Standard ARC-type andhigh Phi-factor test cells.
Available in Stainless Steel, Hastelloy, and glass.
Volume range 0.5 ml to 10 ml.
Temperature Control
Ambient to 500 °C.
Optional: Low-temperature addition (starting at -20 ⁰C or -40 ⁰C dependant on oil circulator) for testing of highly unstable chemicals.
High Pressure and Vacuum Systems
Pressure range 1 to 150 bar.
Intelligent Software Control and Analysis
labCONSOL software control enables regular data logging, multi-step recipes, parameter control, and feedback loops. The software adds a responsive intelligence to the TSusystem and still delivers an intuitive interface that needs only minimal training to run quickly.
Customizable standard plans allow for easy running of the system with automated heating, detection of gas generation, and safety steps.
Optional: Bespoke testing methods.
Safety Features
Automatic, user-configurable hazard detection andshutdown proceduresto ensure user safety.
Automatic hardware and software fail-safes are installed on every system
The PlasmaPro 100 ALE from Oxford Instruments provides accurate process control of etching for ne……...
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