QUALI-LINE® PRIMÅ: A Chemical Monitoring System for Copper Interconnects
In semiconductor applications, Copper Damascene processes play a crucial role in the fabrication ……...
Tilt-Tip Nanopositioning System - XPS-Theta-Gamma-2A
The XPS-Theta-Gamma-2A has been developed for applications requiring high speed positioning of mirrors in optical inspection and imaging systems. The mirror is simply fixed onto the tilting platform of the stage to provide > 2 milliradians of travel with sub microradian resolution.
Features
Features of the XPS-Theta-Gamma-2A tilt-tip nanopositioning system include:
2 milli-radians open loop range
Enclosed mechanism for high stability and reliability
High bandwidth
Simple flexure design for low cost/high volume applications
Applications
The XPS-Theta-Gamma-2A tilt-tip nanopositioning system can be used for such applications as:
Precision beam steering
Image jitter correction
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