The ZMI Series from ZYGO for OEM Applications

ZYGO, a leading company in technology and application support in heterodyne displacement interferometry, offers complete solutions and support for OEM metrology application with its ZMI™ Series Displacement Measuring Interferometers. The OEM products and technologies from ZYGO have been field proven for several years of use in leading-edge production facilities.

Key Features

The main features of the ZMI™ series include:

Highly robust for OEM applications

Heterodyne displacement interferometry

Highly stable, easy to align, and insensitive to signal amplitude changes

A single laser source capable of supporting multiple axes

High signal to noise phase measurements enable high precision and remove false counts, even at zero slew rates

Typical Applications

Following are the typical applications of the ZMI™ series:

Metrology tools: Mask, wafer, and LCD measurement and inspection tools, and CD-SEMs

Lithography tools: e-beam and laser mask writers, scanners and optical steppers

Calibration: Measurement and calibration of high frequency or high resolution mechanical motions

Process equipment: die bonders, drilling tools, memory repair tools, and probers

Configure the system to suit specific requirements:

ZYGO offers a wide range of

Feedthroughs and cables

Measurement electronics

Optics and interferometers

Laser heads

This modular approach allows the user to configure a system that perfectly suits their needs by selecting the most suitable components.