Nanostructured & Amorphous Materials Inc
Nanostructured & Amorphous Materials Inc. (NanoAmor) was founded in Los Alamos, New Mexico, U……...
ZYGO, a leader in technology and application support in heterodyne displacement interferometry, provides complete solutions and support for OEM metrology application with its ZMI™ Series Displacement Measuring Interferometers. The company’s OEM products and technologies have been field proven for a number of years of use in leading-edge production facilities.
Key Features
The key features of the ZMI™ series are as follows:
Heterodyne displacement interferometry
A single laser source capable of supporting multiple axes
Easy to align, highly stable, and insensitive to signal amplitude changes
High signal to noise phase measurements enable high precision and remove false counts, even at zero slew rates
Highly robust for OEM applications
Typical Applications
The typical applications of the ZMI™ series are as follows:
Calibration: Measurement and calibration of high frequency or high resolution mechanical motions
Lithography tools: e-beam and laser mask writers, optical steppers and scanners
Process equipment: probers, memory repair tools, drilling tools, and die bonders
Metrology tools: Wafer, mask, and LCD measurement and inspection tools, and CD-SEMs
Configure the system to suit specific needs:
ZYGO offers a variety of
Laser heads
Interferometers and optics
Measurement electronics
Cables and feedthroughs
This modular approach enables the user to configure a system that ideally suits their requirements by selecting the most appropriate components.
Nanostructured & Amorphous Materials Inc. (NanoAmor) was founded in Los Alamos, New Mexico, U……...
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