The ZMI Series Displacement Measuring Interferometers

ZYGO, a leader in technology and application support in heterodyne displacement interferometry, provides complete solutions and support for OEM metrology application with its ZMI™ Series Displacement Measuring Interferometers. The company’s OEM products and technologies have been field proven for a number of years of use in leading-edge production facilities.

Key Features

The key features of the ZMI™ series are as follows:

Heterodyne displacement interferometry

A single laser source capable of supporting multiple axes

Easy to align, highly stable, and insensitive to signal amplitude changes

High signal to noise phase measurements enable high precision and remove false counts, even at zero slew rates

Highly robust for OEM applications

Typical Applications

The typical applications of the ZMI™ series are as follows:

Calibration: Measurement and calibration of high frequency or high resolution mechanical motions

Lithography tools: e-beam and laser mask writers, optical steppers and scanners

Process equipment: probers, memory repair tools, drilling tools, and die bonders

Metrology tools: Wafer, mask, and LCD measurement and inspection tools, and CD-SEMs

Configure the system to suit specific needs:

ZYGO offers a variety of

Laser heads

Interferometers and optics

Measurement electronics

Cables and feedthroughs

This modular approach enables the user to configure a system that ideally suits their requirements by selecting the most appropriate components.