The TMC STACIS® III Advanced Active Vibration Cancellation System

TMC‘s STACIS® III is a sophisticated active vibration cancellation system that uses state-of-the-art piezoelectric actuators, sophisticated inertial vibration sensors, and advanced control algorithms. The system cancels vibration in real time through constant measurement of floor activity and then filters out floor motion through expansion and contraction of piezoelectric actuators.

STACIS was initially developed to separate metrology, precision microlithography, and inspection equipment in sophisticated semiconductor factories, but now it has become the industry standard for highly sensitive instruments in noisy environments. The control system also features DC-2020, a new, improved digital controller. In addition, it includes a new dual-core processor, and Ethernet and USB serial ports on both the front and rear panels to provide users with a contemporary, easy-to-use graphical user interface (GUI).

STACIS does not have the limitations of air vibration isolation systems as it is relatively stiffer than air isolators. The absence of “soft” suspension is another key feature of this advanced system. STACIS is different from active air systems and can be placed underneath a tool featuring an integrated active air isolation system. This approach enables full optimization of both the systems.

With the exclusive serial design and proprietary high-force piezoelectric technology, STACIS^® III has a broad active bandwidth ranging from 0.6Hz to 150Hz and unprecedented vibration cancellation at 1-3Hz.

STACIS has been deployed successfully across the globe. It is suitable for instruments that are sensitive to vibrations. STACIS^® system on “risers” when deployed under a customized TMC Quiet Island^® subfloor platform can support an eBeam lithography tool in a 36” tall raised floor.

Features and Benefits

The main features of the STACIS^® III piezoelectric active vibration cancellation system are as follows:

6 degree-of-freedom active hard mount design, without soft air suspension

Improves throughput, quality and yield

Utilizes STACIS^® technology to cancel vibration through piezoelectric actuators

New, improved DC-2020 digital controller provides user-friendly GUI

Rugged control system eliminates the need for scheduled re-tuning

Point-of-use solution can be used with all internal tool vibration isolation equipment

Tool vibration criteria are met as vibration levels increase over time

Allows older and noisier floors to accommodate advanced tools

Digital controller with PC-based GUI

Vibration isolation begins at 0.6Hz, with 40% to 70% isolation at 1Hz

Active bandwidth, 0.6Hz to 150Hz

Provides greater than 90% isolation at 2Hz and higher, vertical and horizontal

Reduces fab floor construction expenses and makes it possible to install tools in higher vibration environments

Can be used with different floor heights and sub-floor geometries in fabs

RoHS compliant version also available

Recommended by many tool manufacturers

Applications

The STACIS^® III piezoelectric active vibration cancellation system is used in the following applications:

Failure analysis labs

Semiconductor fabs

Nanofabrication facilities

Nanotechnology research

Materials research

Specifications

The specifications of the STACIS® III system are given in the following table:

The isolator dimensions, environmental, and utility requirements are given in the following table:

The key specifications of the DC-2020 controller are summarized in the following table:

Performance of the STACIS III System

The following graph shows the performance benefit of the STACIS® III system:

The TMC STACIS® III Advanced Active Vibration Cancellation System

STACIS® III (Piezoelectric Active Vibration Cancellation System)STACIS® System on “risers” installed under a custom designed TMC Quiet Island® subfloor platform to support an eBeam lithography tool in a 36” tall raised floor.A STACIS® System, incorporating a non-ferromagnetic, highly damped, aluminum platform, provides a second stage of vibration isolation for a Bruker BioSpin 600 MHz NMR Spectrometer. Photo courtesy of Bruker BioSpin and Memorial Sloan Kettering Cancer Center.DC-2020 and PC-Bassed Graphical User InterfaceSTACIS® supporting the end chambers of a prototype LIGO interferometer at the California Institute of Technology. These are the most precise instruments ever made – capable of measuring distances of less than 10-18 meters.