The Tencor® P-7 Stylus Profiler from KLA Instruments™

The KLA Instruments Tencor® P-7 stylus profiler surface measurement systemprovides excellent measurement repeatability for consistent measurement performance. It has 150mm scan length standard that can provide long scan capability without the need for stitching.

The Tencor P-7 includes the UltraLite^®sensor, which delivers dynamic force control, exceptional linearity, and high vertical resolution, thereby making it an ideal sensor for a surface measurement system.

TheP-7 stylus profileris one of the easiest devices to use on the market, and its features are designed to suit R&D, university, and production environments.

Key Features

The main features of the P-7 stylus profiler include:

Vertical range up to 1mm

Ultra-flat scanning stage

Superior measurement repeatability and reproducibility

Fully-motorized XY stage, Z stage, and 360° theta stage

Surface measurement system with point-and-click operation and productivity package (sequencing, pattern recognition, SECS/GEM)

Reliable

Easily adaptable

Applications

The main applications of theP-7 stylus profilerinclude:

Thin and thick film step height measurements

Surface roughness and waviness characterization

Photoresist / soft films

Etched trench depth

Defect review and defect analysis

Surface curvature and form

2D stress of thin films

3D imaging of various surfaces

Dimensional analysis and surface texture

Broad Range of Industries

The P-7 capabilities support research, production, and quality control (QC) across a wide range of industries, including:

Universities, research labs, and institutes

Medical devices

Semiconductor and compound semiconductor

SIMS craters

LED (light-emitting diodes) and power devices

Solar

Automotive

MEMS (micro-electro-mechanical systems)

Data storage