The Tencor® P-17 Stylus Profiler from KLA Instruments™

The P-17 stylus profiler surface measurement systemfrom KLA Instruments provides excellent measurement repeatability for consistent measurement of 2D and 3D topography. It has 200mm scan length standard that can provide long scan capability without the need for stitching. The P-17 OF (Open Frame) configuration provides a larger frame for samples up to 300mm.

The P-17 measurement head includes the UltraLite^®sensor, which delivers dynamic force control, exceptional linearity, and high vertical resolution, making it an ideal sensor for characterization of step height, surface roughness and waviness, bow, thin film stress, and defect review.

TheP-17 stylus profileris designed for ease-of-use, with fast recipe setup, top and side view optics and a 5MP high resolution color camera. Advanced data analysis and automated production features are equally suited to R&D, university, and production environments.

Key Features

The main features of the P-17 stylus profiler include:

Vertical range from nm up to 1mm

Constant force control from 0.03 to 50mg

Full diameter scanning without stitching for bow and film stress measurement

Superior measurement repeatability and reproducibility

Easy-to-use software, including fully-automated measurement with sequencing, pattern recognition, and SECS/GEM

Fully-motorized XY stage, Z stage, and 360° theta stage

Applications

The main applications of theP-17 stylus profilerinclude:

Thin and thick film step height measurements

Surface roughness and waviness characterization

Photoresist / soft films

Etched trench depth

Defect review and defect analysis

Surface curvature and form

2D stress of thin films

3D imaging of various surfaces

Dimensional analysis and surface texture

Broad Range of Industries

The P-17 capabilities support research, production, and quality control (QC) across a wide range of industries, including:

Universities, research labs, and institutes

Medical devices

Semiconductor and compound semiconductor

SIMS craters

LED (light-emitting diodes) and power devices

Solar

Automotive

MEMS (micro-electro-mechanical systems)

Data storage