The QUALISURF® QSF-22: A Benchtop NIR Chemical Analyzer

The precision, speedand a wide range of NIR spectroscopy make it highly useful in the development of chemical metrology, specifically for cleaning and etch processes.

The QUALISURF^® QSF-22 integrates NIR spectroscopy with ECI Technology’s Smart-BT software to support the advancement of quantitative analyses of new chemicals for quality control and process optimization.

The speed, ease, cost-effectivenessand precision of the QSF-22 analyzer are the perfect fit for developing new chemistries, particularly when analyzing proprietary chemistries. The QSF-22 analyzer can also be used by chemical suppliers for quality control.

Apart from typical NIR spectroscopy that can simply acquire spectra, the QSF-22 analyzer can examine the spectra, produce recipesand easily transfer them to ECI’s QUALISURF Online Analyzers to quantify the target chemicals.

Key Features

NIR spectroscopy

Unrivaled performance, thanks to high S/N ratio obtained by long term stability of less than 0.0002 A.U.

Analysis time is less than 30 seconds

Operated through a USB port

Low CoO: Just one PM part (bulb every six months)

Manual mode is available for all components

Includes a solution sampling port

Key Benefits

Small footprint

Less than 3% accuracy

A recipe can be created for quantitative analysis

Recipes can be easily transferred from the laboratory to the production

Easily transfer recipes from the lab to production

Technical Specifications

Conforming standards: CE and NFPA

Dimensions: 406 (16″) width x 374.7 (14.75″) depth x 247.7 mm (9.75″) height (excluding the laptop)

Data communication: Numerous communication protocols such as Serial, RS-232, TCP/IPand SECS/GEM