The QUALI-DOSE®: A System for Automatic Chemical Replenishment System

ECI Technology’s dosing experience of more than 15 years enables the QUALI-DOSE^® systems to provide the most novel and comprehensive solutions for handling chemistries in existing Advanced Packaging applications.

The QUALI-DOSE system combines with QUALI-FILL^® analyzers from ECI Technology to create a comprehensive online chemical management system—the most robust tool available for facilitating stringent chemical process control.

The QUALI-DOSE system uses smart, versatile algorithms and modes to make up, replenish, or bleed and feed the tank. Powered by quick, efficient dosing, the QUALI-DOSE systems generate no waste and avoid the need for regular maintenance.

Thanks to a system that can offer precise dosing with verification of all the critical components, users can enjoy an unparalleled level of convenience and reliability for running their plating process.

Key Features

Flexible dosing options are available based on:

Wafer count

Analysis results

Tank level

Amp/minute

Concentration levels of target or other components

Time-based

All crucial components can be dosed:

DI water

Inorganics

Organics

Feed and bleed (optional)

Virgin makeup solution (VMS)

Automatic standard generation (ASG)*

Avoids frequent chemical handling and mixing

Avoids the need to buy high cost standard

Minimizes CoO, laborand maintenance

Automatic validation—positive feedback with confirmation of each delivery

Works in compliance with the industry safety standards: CE SEMI and S2/S8

Supports multiple tanks, plating tools, and chemistries

Manual mode for any component

Can be combined with ECI QUALI-FILL^® analyzers or used individually

Includes NOWPak^® reagent delivery system

Can be combined with pressurized and automated central chemical bulk and blending systems

*Chemistry-dependent

Key Benefits

Multiple delivery validations

Accuracy of <3%

Supports multiple tanks

Extensive range of flow rates from 20 mL/minute to 5000 mL/minute

Analyzer-controlled or operates independently

Multiple dosing modes: dose to target, manual, feed-forward, feedback, time-based, amp/hour, wafer count, etc.

Automatic verification with bar code eliminates human error

Recipes provided for new bath make up and replenishment

Any number of components can be dosed

Handles bath dump or bleed and feed

Ability to dose directly from pressurized chemical bulks (central chemical distribution systems)

Integrates through buffer tank, slip-stream, or direct injection methods



Smaller process variability when using an ECI QUALI-DOSE system



Greater process variability when using an alternative doser

Image Credit: ECI Technology

Technical Specifications

Dimensions—1829 mm (72″) W x 2061 mm (81.1″) H x 610 mm (24.0″) D

Compliance standards: CE, SEMI F47, SEMI S2-S8, NFPA 79

Data communication—Multiple communication protocols such as SECS/GEM, Serial, RS-232and TCP/IP

AC—180 to 245 VAC, 50/60 Hz, 15 A