The Alpha-Step® D-600 Stylus Profiler from KLA Instruments™

The Alpha-Step D-600 stylus profilerfrom KLA Instruments is the latest evolution of the successful Alpha-Step profilers, first introduced by Tencor Instruments in 1977. It provides advanced high resolution 2D and 3D profiling, profile stitching, 2D stress, and several other features in a convenient, compact footprint, user-friendly platform.

The D-600 stylus profiler comprises a 200mm motorized stage, with 150mm x 178mm X-Y range of motion and an advanced optical lever sensor technology. It also consists of advanced optics and improved video controls for flexible sample visualization.

The novel sequencing software is provided with manual deskew alignment, which enables users to program up to 1000 locations.

The D-600 stylus profiler can measure many applications in 2D and 3D, from nanometer to millimeter steps, soft materials, high resolution roughness, and thin film stress, thereby making it the most versatile stylus profiler available in the market.

Key Features

The main features of theAlpha-Step^®D-600 stylus profilerinclude:

Intuitive user interface

Low force measurements of 0.03 to 15mg

High resolution 5MP color camera with 4x digital zoom

Highest vertical range at 1200µm

Step height repeatability of 5Å on a 1µm step

Keystone correction, sequencing with deskew, arc correction and automated stitching software features

Applications

The main applications of theAlpha-Step^®D-600 stylus profilerinclude:

LED

MEMS

Solar

Universities

Automotive

Medical devices

Materials research

Semiconductor

Data storage

Government labs