The Alpha-Step® D-500 Stylus Profiler from KLA Instruments™

KLA’s Alpha-Step^®D-500 stylus profileris an easy-to-use device that offers advanced high resolution 2D profiling, profile stitching, 2D stress and many additional features in a convenient, compact footprint, user-friendly platform. The stylus profiler features an innovative optical lever sensor technology and a 140mm manual stage, along with improved video controls for versatile sample visualization using its advanced optics.

TheD-500 stylus profilerhas the capability to address a number of applications in 2D, from nanometer to millimeter steps, soft materials, high resolution roughness, and thin film stress, thereby making it one of the most flexible 2D stylus profilers available in the market.

Key Features

The main features of theAlpha-Step^®D-500 stylus profilerinclude:

Intuitive user interface

Highest vertical range at 1200µm

Step height repeatability of 5Å on a 1µm step

High resolution 5MP color camera with 4x digital zoom

Low force measurements of 0.03 to 15g

Keystone correction and arc correction software features

Applications

The main applications of theAlpha-Step^®D-500 stylus profilerinclude:

Solar

LED

MEMS

Universities

Data storage

Semiconductor and compound semiconductor

Medical devices

Automotive

Materials research

Government labs