The Absolute Position Measurement System from Zygo for High Precision Applications

The new ZPS™ system from ZYGO​ provides high-precision non-contact absolute position measurement on up to 64 synchronized channels.

The ZPS™ system is used to measure absolute position using ultra-compact optical sensors. These sensors can be easily integrated into high-precision applications such as deformable mirrors and lens positioning.

The optical sensor system offers high-precision, non-contact, absolute position measurement on up to 64 synchronized channels spanning a range of 1.2 mm. Measurement resolution is 0.01 nm with ≤ 1 nm/day measurement stability.

The optical sensors do not produce heat and are insensitive to electromagnetic interference. This makes the ZPS system suitable for high-precision applications that can be affected by the aforementioned factors. The ultra-compact sensors connect to the compact centralized enclosure through fiber optic cables.

All electronics for the absolute position measurement system are housed in this rack-mountable enclosure.

Applications

The ZPS system is usually used in closed-loop feedback systems that require a nonstop stream of high-precision data from multiple sensors in order to compensate for drift and maintain precise alignment and positioning. The system can also be used as a tool in manufacturing environments and RD&E to quantify dynamic mechanical performance or for alignment in test fixtures.

Deformable Optics

Lens Positioning

Mechanical Measurements

Precision Stage Control

Key Features

The key features of the ZPS system are as follows:

Non-contact optical measurement

Scalable, up to 64 channels

Repeatable absolute position measurement (≤ 0.5 nm, 3 σ)

Ultra-compact sensors with no heat generation or EMI sensitivity

Reliable telecom-proven fiber optic components

High-precision system by using proprietary compensation algorithms

ZYGO offers everything you need to integrate the ZPS system into your application, including fiber optic cables, sensor mounts, and user interface software.