IMP-EPD: System for Ion Etch Control and Optimum Process Quality from Hiden Analytical
The IMP-EPD is a rugged, differentially pumped, secondary ion mass spectrometer that is designed ……...
TALYS ASP300 - Wet Bath Monitoring Analyzer from ABB
The TALYS- ASP300 is a wet bath monitoring analyzer which is designed for use in semiconductor industry. It is also suitable for monitoring a wet etching, cleaning, and PR removal bath.
It satisfies the requirements of equipment suppliers to solar and LED Fabs, and semiconductor at low cost. It is housed in a single enclosure with a minimum footprint.
It is very easy to install, and can be mounted on a wall or a shelf. A fiber optics interface helps in remotely connecting the TALYS to the sample point. The TALYS- ASP300 avoids the need of using an external PC.
The TALYS has high performance, which enables the engineers and equipment operators to minimize the usage of chemicals and to reduce excursion events with real time bath component predictions.
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