Nanopatterning Benchmark: ELPHY MultiBeam
The ELPHY MultiBeam from Raith sets a new commercial standard for SEM and FIB-SEM nanolithography……...
HORIBA’s high spectral resolution EMCCD Scientific Cameras with different image areas are useful for high or multi-track spectroscopy. The cameras can collect more than 1,600 spectra per second at readout rates of up to 3 MHz.
The EMCCD Scientific Cameras have dual EMCCD and CCD readout modes to accommodate a wide variety of light conditions and deep thermoelectric cooling with air or liquid circulation to reduce dark current. The single fused-silica vacuum window reduces reflection losses from UV to near-IR.
Features
1600 × 200 or 1600 × 400 EMCCD sensor
16 × 16 μm pixel size for high spectral resolution
25.6 × 3.2 mm or 25.6 × 6.4 mm image area
Ideal for high-speed or multi-track spectroscopy
Back- and front-illuminated
BIQX Technology with enhanced QE below 450 nm
Deep thermoelectric cooling
Air or liquid circulation to minimize dark current
Dual readout modes
EMCCD or CCD for a broad range of light conditions
Readout rates up to 3 MHz
Acquires more than 1600 spectra per second
Single fused-silica vacuum window
Minimizes reflection losses from UV to near-IR
Specifications
EMCCD Camera Specifications
Source: HORIBA Scientific
. | . | . | . |
---|---|---|---|
Sensor | Front-illuminated (FI), back-illuminated (BI), scientific grade 1 | ||
Active pixels | 1600 × 200 | 1600 × 400 | |
Pixel size | 16 μm × 16 μm | ||
Image area | 25.6 mm × 3.2 mm | 25.6 mm × 6.4 mm | |
Output node well capacity High Sensitivity mode Electron Multiplying mode | 300,000 e—1,300,000 e— | ||
Register well depth High Sensitivity mode Electron Multiplying mode | 450,000 e—800,000 e— | ||
Non-linearity(measured at all speeds per camera) | Non-linearity (measured at all speeds per camera) | ||
Readout Noise (e—): Typ. (Max) High Sensitivity mode: EM off Electron Multiplying mode: EM off Electron Multiplying mode: EM on | 50 kHz2.7 (5)8.0 (15)< 1 | 1 MHz6.1 (9)23 (35)< 1 | 3 MHz8.5 (12)38 (50)< 1 |
Dark Current at —60 °C (e—/pixel/s) FI BI | < 0.0025< 0.015 | ||
Maximum spectra per second Full vertical bin ROI mode 20 rows ROI mode 8 rows(1) | 61614751613 | 37614751613 | |
Software-adjustable gain (e—/count) High Sensitivity mode Electron Multiplying mode | Selectable from 0.6 to 4.0Selectable from 3.6 to 25 | ||
Electron multiplier gain | 1 to 1000, software-controlled | ||
Digitization | 16-bit ADC | ||
Vertical shift rates | 4.9, 9.6, 19 software-selectable* | ||
Cooling at +20 °C Air-cooled Liquid-cooling recirculator | —60 °C (guaranteed)—75 °C (typical) | ||
Power requirements AC-DC power supply (provided) | AC input 90–264 VAC, 47–63 HzDC output +9 V, 6.44 A maximum |
* Some decrease in CTE may be observed at faster speeds
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