Surrey Nanosystems

Surrey NanoSystems produces the world's most advanced tools and Carbon Nanotube processing recipes - making precision, repeatable nanotube and nanowire fabrication a reality. Surrey NanoSystems designed-for-purpose tools bridge the gap between R&D initiatives and the volume production of commercial nanotechnology-based products.

The NanoGrowth™ system, containing intellectual world-leading property developed over many years at The University of Surrey's Advanced Technology Institute (ATI), and by the thin-film tool maker CEVP, provides a versatile and proven platform for nanoengineering research, development, and production. This includes a pioneering technique for the precision growth of Carbon Nanotubes at temperatures compatible with semiconductor fabrication processes.

The NanoGrowthPlatform

highly-programmable CVD, PECVD and ICP processing

proven material growth recipes including unique lower-temperature processes

modular and scalable hardware, from a benchtop furnace, to a load/lock system with built-in catalyst source

common software control throughout the range of tools

Surrey NanoSystems will configure and build the turnkey process equipment you need to support your nanoengineering and thin film programs.

Surrey NanoSystems' Products and Services

Tools for carbon nanotube and nanowire fabrication

PVD/PECVD sputtering tools for semiconductor, MEMS, GMR fabrication

RF power switches and accessories