SU5000 Versatile, Analytical Variable Pressure FE-SEM

The SU5000 is a high resolution, analytical, variable pressure SEM with a focus on ease-of-use, flexibility and high throughput.

Imaging performance

• Image any kind of sample easily using the field-free optics and variable pressure• Up to 4 signals in parallel for morphology, topography, chemistry and crystallography• Understand crystallography and composition using the angularly selective BSE detector

(1) ECCI: dislocations of lattice in steel; (2) Sandstone, uncoated, low vacuum; (3) Cryo: sugar cane cross-section.

Simple specimen handling

• Fast sample exchange through the front door or with the optional load lock• Quick, risk-free navigation using color navigation image and stage protection systems• Automatically image large sample areas over multiple fields of view• Add in-situ substages for dynamic experiments (mechanical , environmental, etc.)

Clean and flexible vacuum system

• Switch to variable pressure at any time with just a click• No restriction in field of view or probe current when switching to variable pressure• Keep system and samples clean with the dry vacuum system or by adding a plasma cleaner

Future proof

• Made for fast and detailed analysis using single or multiple EDS detectors, EBSD and WDS• Image hydrated or sensitive samples using cryo cooling or Hitachi patented Ionic Liquid• Add Cathodoluminescence (CL) for more information from minerals, photonics or pharmaceuticals