Zeta™-300 - Non-Contact Profiler for Surface Metrology
The Zeta™-300 optical profiler offers 3D metrology and imaging, with an integrated isolatio……...

The SU5000 from Hitachi is an analytical, high resolution, variable pressure SEM with a focus on flexibility, user-friendliness, and high throughput.
Imaging Performance
Users can image any type of sample easily with the help of the variable pressure and field-free optics
Crystallography and composition can be comprehended with the angularly selective BSE detector
Up to four signals can be provided simultaneously for crystallography, chemistry, topography, and morphology

(1) ECCI: dislocations of lattice in steel; (2) Sandstone, uncoated, low vacuum; (3) Cryo: sugar cane cross-section. Image Credit: Hitachi High-Tech Europe
Simple Specimen Handling
A quick exchange of samples can be done via the front door or with the optional load lock
Rapid and no-risk navigation with the help of stage protection systems and color navigation image
Users can image huge sample areas automatically over multiple fields of view
Substages can be added in-situ for dynamic experiments (environmental, mechanical, etc.)
Clean and Flexible Vacuum System
Users have the option to switch to variable pressure any time with just a single click
System and samples can be kept clean with the help of the dry vacuum system or by adding a plasma cleaner
No limitation in probe current or field of view while switching to variable pressure
Future Proof
Designed for quick and elaborate analysis with single or multiple EDS detectors, WDS, and EBSD
Hydrated or sensitive samples can be imaged with the help of Hitachi’s patented Ionic Liquid or cryo cooling
Users can add cathodoluminescence (CL) for more data from pharmaceuticals, photonics, or minerals
The Zeta™-300 optical profiler offers 3D metrology and imaging, with an integrated isolatio……...
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