BE Semiconductor Industries N.V.
Besi is a leading supplier of semiconductor assembly equipment for the global semiconductor and e……...
The SU3800 and SU3900 are robust and flexible thermionic emitter variable pressure SEMs. The SU3900's extra-large stage and chamber make it perfectly suited to the study of large, heavy or multiple specimens.
Imaging performance
• Exceptional low voltage performance to reveal additional fine structure• Fast and sensitive detectors easily provides surface detail, morphology, composition and crystallography• Image wet or hydrated samples using cold stage or Hitachi’s patented ionic liquid
High-Performance Microanalysis
• Choose between fully integrated EDS from Oxford Instruments or a flexible choice of EDS/EBSD/WDS from any manufacturer•Multiple ports available for analytical detectors, single or multiple EDS, EBSD, WDS or CL
Easily handle and navigate any sample
•Load samples up to 130 mm height and 300 mm diameter with all 5 axes functional• Never get lost: Easy and safe navigation on your sample using the colour navigation camera• Perform dynamic experiments in-situ with tensile, heating, cooling or probing sub-stages.
Advanced automation
• Examine wide areas with image stitching• Automated particle analysis for technical cleanliness, asbestos, inclusions, fibres, etc.• EM-Macro scripting or recording interface allows repetitive or complex procedures to be automated
Future proof
•Integrated Cathodoluminescence (CL) for more information from minerals, photonics or pharmaceuticals• 3D surface metrology with depth/angle/roughness measurement
(1) Pollen, low-vacuum SE, 1.5 kV; (2) Metal cross-section, BSE, 3 kV; (3) Copper minerals, low-vacuum, 5 kV.
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