STACIS® 4: Revolutionizing Vibration Isolation

STACIS^® 4 is themost cutting-edge active vibration isolation solution currently on the market.

Using inertial vibration sensors, sophisticated control algorithms, and state-of-the-art piezoelectric actuators, STACIS cancels vibration in real-time by continuously measuring floor activity, then expanding and contracting piezoelectric actuators to filter out floor motion.

The all-new STACIS 4 is built upon the success of TMC's proven STACIS technology, which 9 of the top 10 semiconductor manufacturers in the worlduse.

STACIS was originally designed to isolate precision microlithography, metrology, and inspection equipment in sophisticated semiconductor factories, but it has since become the industry standard solution for the most sensitive instruments in noisy environments, including but not limited to failure analysis, nanotechnology research, nanofabrication, structural biology, and materials research.

The DC-2020 digital controller with a dual-core processor is new and enhanced in STACIS 4. This new powerful control system features an intuitive Graphical User Interface (GUI).

STACIS 4 expands on the superior architecture of earlier versions by including advanced control algorithms and new proprietary technologies. The results are previously unattainable vibration cancellation of building floor vibration at all frequencies, but especially below 10Hz, where high-resolution imaging and metrology are most sensitive.

When paired with proprietary FloorSense^™ technology, STACIS 4 decreases building floor vibration by 60 dB at 2 Hz and 27 dB at 1 Hz. The complete performance parameters for STACIS 4 are listed below.

The STACIS 4 Advantage

STACIS, which is hundreds of times stiffer than air isolators, has none of the limitations of air vibration isolation devices. There is no “soft” suspension, and unlike active air systems, STACIS can be installed beneath a tool that has an internal active air isolation system, with both systems completely optimized.

This results in a broad active bandwidth ranging from 0.2 to 150 Hz and unrivaled active isolation with up to 99.9% vibration reduction at 2Hz.

STACIS 4 outperforms the industry standard solution in terms of vibration control at 2 Hz by up to 60 dB.

Unlike rival parallel designs, which are inherently unstable and require constant tuning to maintain top performance, the robust serial designallows users to set it and forget it. In addition, STACIS 4 offers a two-stage vibration control design, incorporating passive or active parallel platforms on top of the STACIS system. Two-stage designs are becoming more common as instruments are forced to finer resolutions.

STACIS 4 performance is able to help users reduce theirvibration environment by up to 5 VC curves on a stable floor. In addition, this performance gives users the flexibility to install instruments in less-than-ideal vibration environments, allowing more flexibility in facility layout and design.

Performance

4500 lbs (2045 kg) payload evaluated at VC-C (500 μin/second, 12.5 μm/second RMS) with simulated vibration. Horizontal and vertical axes.

Vertical Transmissibility Curve. Image Credit: TMC Vibration Control

Horizontal Transmissibility Curve. Image Credit: TMC Vibration Control

Specifications

Performance Specifications. Source: TMC Vibration Control

Isolator Design, Dimensions, and Environmental and Utility Requirements. Source: TMC Vibration Control

DC-2020 Controller Specifications. Source: TMC Vibration Control

STACIS Web GUI

With just a web browser and a PC, STACIS active piezoelectric systems can be managed using an easy-to-use web-based user interface (Web GUI).

Image Credit: TMC Vibration Control

Users can review status, control setup and operation, and enter diagnostic instructions using the Web GUI.

Image Credit: TMC Vibration Control

Web GUI Plus

For more experienced users, TMC provides the Web GUI Plus, an improved version of the Web GUI. It also has an integrated oscilloscope that can track the input and output of vibration for each axis, in addition to more sophisticated diagnostic features.

Image Credit: TMC Vibration Control

Application Photos

Extra thick optical bench.Image Credit: TMC Vibration Control

Cryo Transmission Electron MIcroscope for structural biology. Image Credit: TMC Vibration Control

Scanning tunneling microscope. Image Credit: TMC Vibration Control

Cameca NanoSIMS. Image Credit: TMC Vibration Control

Prototype LIGO interferometer. Image Credit: TMC Vibration Control

Quiet Island in a raised floor environment. Image Credit: TMC Vibration Control