STA-10 - Automated Plasma System

The STA-10iL automated plasma system is engineered to clean and activate substrates for enhanced adhesion, making it ideal for semiconductor packaging and electronics manufacturing. It features standard in-line conveyance for high-volume production, with an optional drawer available for high-mix, low-volume manufacturing needs.

Inside the STA-10iL, a three-axis gantry precisely applies advanced atmospheric plasma to your substrates. The system utilizes Surfx’s Atomflo^™ controller, which operates with low-voltage radio frequency (RF) power to generate a uniform, particle-free, and electrically neutral plasma. This plasma is safe for use on even the most sensitive electronics.

Numerous solutions are available for in-line or batch production with complete traceability using the STA-10iL:

Inert gas purge for reducing gas chemistry

Substrate heating and cooling

Oxygen plasma for organic clean

Hydrogen plasma for metal oxide removal

Cleanroom class 100 (10,000 is standard)

Image Credit: Surfx Technologies, LLC

STA-10iL Specifications

Work area (X * Y * Z): 550 × 760 × 60 mm

Footprint (W * D * H): 1,000 × 1,500 × 1,550 mm, 39.4 × 59.1 × 61.0 inches

Software and OS: Cloudbreak^™ for quick development of programs

Patented plasma technology:

Atmospheric argon plasma

RF capacitive discharge

O₂, H₂, N₂ plasma chemistry

The STA-10iL is specially made for single-part traceability, high dependability, and zero-damage precision plasma cleaning of semiconductors and other devices.

Source: Surfx Technologies, LLC

Image Credit: Surfx Technologies, LLC